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All Spare Parts for saleParts for Canon StepperParts for AMATParts for TEL TrackParts for ETC
Canon Stepper Y60-081 ( BD3-3199 ) Z Feeding Ball Screw
Canon Stepper HBO-2001 W/CIL (FPA-3000i4 Lamp) OEM New
AMAT P/C#2 Chamber
AMAT PVD Txz HP+ Chamber
AMAT Etch ASP+ Chamber
AMAT Etch Fast Cool Down
AMAT DI Box
AMAT VDS Ass'y
AMAT P/C#2 Resonator
AMAT Gas Box_Txz
AMAT PVD Txz HP+ Chamber
AMAT PVD P/C#2 Chamber
AMAT Etch Fast Cool Down
AMAT DI Box
AMAT Etch ASP+ Chamber
AMAT P/C#2 Resonator
AMAT VDS Ass'y
AMAT Gas Box_Txz
TEL Track Hot plate module
Chemical mixing system
Manual coater
Auto Drain System
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