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All Spare Parts for saleParts for Canon StepperParts for AMATParts for TEL TrackParts for ETC
AMAT Part No : 0970-01002 , ISOL WATER COOLER RPS
AMAT Part No : 0200-36105 , CHAMBER INSERT 200MM TXZ CIP
AMAT Part No : 3870-01000 , VALVE ASSY THROTTLE MxP + 200MM, GEAR TYP
AMAT Part No : 0020-32318 , GAS DISTR PLATE, 37 HOLES, OXALIC, 5-7 MIL, EGEC
AMAT Part No : 0040-04221 , CHAMBER MISC (LID, LEXAN, SLIT LINER DOOR)
AMAT Part No : 0020-32036 , PLATE BLOCKER 100 SX, UNIVERSAL CHAMBER
AMAT Part No : 0020-20223 , PLATE, GAS DISTRIBUT , 2-12150000-18 REV:G-
AMAT Part No : 0010-01442 , Microwave Endpoint Detector
AMAT Part No : DC 24V Power Supply
AMAT Part No : 0100-70008 , Heat Exchanger AC Box
AMAT Part No : 0010-00563 , 2V Power Supply (LAMBDA)
AMAT Part No : 0010-00138 , DC 24V Power Supply
AMAT Part NO : 0021-07482 , CUP OUTER, RIGID SUPPORT,REV5.0 VECTRA IMP
AMAT Part No : 0021-04258 , PLATE, RETAINER ALUMINUM
AMAT Part No : 0021-07483 , CUP OUTER, DUAL FEEDTHRU,REV5.0 VECTRA IMP
AMAT Part No : 0021-22583 , BUSHING RIGID SUPPORT VECTRA IMP ICE
AMAT Part No : 0021-07479 , BAR,RF CONNECTOR FT1, REV5.0 VECTRA IMP
AMAT Part No : 0200-20440 , REST BUTTON, SHORT 300MM VECTRA IMP
AMAT Part No : 0021-07746 , SCREW 8-32 X 1" L SKT HD CAP,TORX,NITRONIC 60
AMAT Part No : 0021-07747 , SCREEW CAPTIVE RF FT 1/4"-20 TORX NITRON
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