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AMAT Spare Parts

작성자: Jason 날짜: 2022-07-20 조회: 1791
No Part's No 품명(Description)
1 0100-09145 PCBA RS232VIDEO INTERC
2 0100-00003 w PWB VME STEPPER CONT. I
3 0100-09134 PCB ASSY DIDO FUSE
4 0100-09020 wPCB ASSY, FUSE BOARD
5 0100-09237 VME TO DUAL FREQ. INTERCONNECT BD
6 0100-20143 PCB ASSY L LOCK WAFER SENSOR
7 0100-09127 wPCB ASSY INTERCONN BD WAFER SENSOR
8 0100-09011 wPCB ASSY, A1 MUX/CURREN SENSE
9 0100-09041 PCB ASSY, HEAT EXCHNGR INTERFACE
10 0190-35774 MULTIPLEXED I/O CONTROL BOARD, CH B
11 0100-35066 CHAMBER PNEUMATIC INTERCONNECT BD
12 0100-01792 PCB ASSY 5-PHASE STEPPER DRIVER INTERFA
13 0100-35065 PCB ASSY SERIAL ISOLATOR
14 0660-01809 Square D VME 30299-083 / Seriplex bus SPX VME6U1V2
15 0090-76015  AMAT Endura Centura V440 SBC SYNERGY 68040
16 0100-20181 Operator control panel with interlock switch
17 0100-00423 PCB ASSY, SERIPLEX I/O DISTRIBUTION, GPLIS
18 0100-20027 PCB Contactor Interlock Board
19 0100-76055 Centerfinder Interface Board
20 0190-00318 AMAT VGA Video Controller ASSY - P-3 486 BOARD
21 0100-35054 CHAMBER INTERFACE BOARD
22 0100-20040 Remote Supply Distribution Board (RF RACK)
23 0100-35053 MAINFRAME  INTERFACE BOARD
24 0100-20038 RF GEN RACK REALY CONTROL
25 0100-00893 PCB, TC GAUGE BOARD
26 0100-00639 200MM SMIF LLK INTERLOCK PCB
27 0190-35773 MULTIPLEXED I/O CONTROL BOARD, CH A
28 1140-01045  DC POWER SUPPLY 15V
29 1140-01046 DC POWER SUPPLY 12V
30  0190-70052 DIGIPLAN AM5 STEPPING MOTOR DRIVE AMAT P5000
31 0010-09340 Susceptor Lift P5000
32 3870-01244 Foreline Valve NW40
33 0020-26574 PLATE CLEAR CHAMBER MONOLITH. P-5000 INTERFACE END CAP
34 0020-26574 PLATE CLEAR CHAMBER MONOLITH. P-5000 INTERFACE END CAP
35 0010-00957 Orienteer Laser 650nm
36 0100-20073 PCB ASSY, WAFER DETECTO MAPPING 
37 0100-20073 PCB ASSY, WAFER DETECTO MAPPING 
38 0110-20169 PCB Wafer Mapping
39 0020-21165 CLAMP 8" BUFFER FROG LEG  WIRST ASS'Y
40 0020-21025 CLAMP 8" BLADE TRANSFER FROG LEG WIRST ASS'Y
41 0020-21112 CLAMP 6" BLADE BUFFER ROBOT  WIRST ASS'Y
42 0020-21114 BLADE 6" BUFFER ROBOT
43 3690-03269 BRG LEADSCR&NUT ASSY .5DX.1LEADX4TRVLX
44 0190-35463 MOTOR, 5 PHASE STEPPER W/ CABLE DXZ
45 0190-35463 MOTOR, 5 PHASE STEPPER W/ CABLE DXZ
46 0090-35123 MOTOR/BRAKE/ENCODER ASSYSTORAGE ELEV. CH-E
47 0190-09372 ASSY, TC, HTR, WxZ
48 0020-18053 Cathode GUIDE LIFT PIN
49 　 MKS TRANSDUCER 10TORR
50 0620-01164 CABLE ASSY 332CG 6"LG + 2.75" 15P-DSUB / Convectron Cable
51 0240-18266 Gas Panel Fujikin Manual Valve
52 3870-02221 VALVE BLOCK DIAPH 1/4VCR-M/F/F NC/NC VIM/Gas Panel 3way Valve
53 3870-01173 USE 3800-01173 RGLTR PRESS SQ-MICRO 0-30 / Gas Panel Regulator
54 1040-01121 MKS LOCAL DISPLAY MODULE LDM-A12PB2CC1
55 0190-01448 HOKE VALVE Long Supply Green Knob
56 0190-01449 HOKE VALVE Long Return BLK Knob
57 0190-01448 HOKE VALVE Long Supply Green Knob
58 0190-01449 HOKE VALVE Long Return BLK Knob
59 0020-31017 BUSHING TERMINAL BWCVD
60 　 INSERTION FLOW SENSOR
61 0150-76156 CABLE ASSY, INSERTION FLOW SENSOR
62 0100-20040 REMOTE SUPPLY DISTRIBUTION BOARD
63 0190-01448 HOKE VALVE Long Supply Green Knob
64 0190-01449 HOKE VALVE Long Return BLK Knob
65 0010-13018 TURCK FLOW CONTROL MONITOR,  CONTROL SENSOR
66 1140-01170 POWER SUPPLY SENSOR REALY 120/220/240VAC 400M
67 　 POWER SUPPLY SENSOR REALY 120/220/240VAC 401M SOCKET
68 　 MF FILTER PALL 3000PSI
69 0200-36631 PLATE COVER 8INCH HEATER DXZ PATTERNED AL. DIHPLE
70 0200-18109 COLLAR, 200MM SNNF, SML FLT, ULTIMA HDPCVD
71 0040-33701 ALN Heater Block 200mm HDP CVD Ultima About this product
72 1310-01059 Top TC    PROBE DUAL CIRCUIT K-TYPE TFE-INSU
73 0010-04542 HEATER, ASSY, 200MM FC WXZ PLUS OSCR
74 0100-08483 CENTURA STD, MASS STORAGE MODULE AMAT -GEM
75 0020-30335 TEFLON HOUSING QUARTZ TUBE SACVD
76 　 ION Gauge Filament
77 0020-28756 Cryo/Gate Valve Process Chamber Interface Stud, Centura Endura PVD
78 0020-28756 Cryo/Gate Valve Process Chamber Interface Stud, Centura Endura PVD
79 0020-07272 CRYO/GATE VALVE W/HEX SOCKET FOR W USED
80 0020-07272 CRYO/GATE VALVE W/HEX SOCKET FOR W USED
81 3090-01110 LOT 6 of BOLT 12PT HD 1/4-28 x 1-3/8 304/316 SST SLVRPLT
82 0150-21692 CABLE ASSY. SQ RIGHT ANGLE W/ INTERLOCK
83 0020-26574 PLATE CLEAR CHAMBER MONOLITH. P-5000 INTERFACE END CAP
84 0020-26574 PLATE CLEAR CHAMBER MONOLITH. P-5000 INTERFACE END CAP
85 0090-04135 Dwyer Photohelic Series 3000MR 24 VDC Pressure Switch Cable
86 　 Banner BT13S FIBER OPTIC CABLE
87 0150-20103 CABLE ASSY, CCD BD INT.
88 　 TURCK WATER FLOW SENSOR CABLE
89 0620-01164 Convectron Gauge Cable
90 0150-76501 CENTURA FLOW MONITOR PIGTAIL. CABLE
91 0150-13048 MOTOR DRIVER INTERFACE PCB CABLE ASSY
92 0150-13048 MOTOR DRIVER INTERFACE PCB CABLE ASSY
93 0150-36998 MOTOR DRIVER INTERFACE PCB CABLE ASSY
94 0150-18079 CABLE ASSY, AC HTR TO INTLK INTFC HDP-CV
95 0150-20197  HARNESS ASSY, TC GAUGE INTERFACE
96 0150-18079 CABLE ASSY, AC HTR TO INTLK INTFC HDP-CVD
97 0150-35141 FLOPPY DRIVE POWER CABLE
98 　 3Phase 30A
99 　 3Phase 20A
100 　 3Phase 40A
101 　 3Phase 50A
102 　 3Phase 60A
103 　 　
104 　 2Phase 40A
105 　 2Phase 10A
106 　 2Phase 20A
107 　 2Phase 15A
108 　 　
109 　 1Phase 30A
110 　 1Phase 10A
111 　 　
112 　 2P TRIP 30A
113 　 2P TRIP 15A
114 　 AS-568A-326
115 　 AS-568A-387
116 　 AS-568A-005
117 3700-02103 AS-568A-251
118 3700-01716 AS-568A-279
119 　 AS-568A-007
120 3700-02765 AS-568A-280
121 　 AS-568A-109
122 　 AS-568A-127
123 　 AS-568A-256
124 　 AS-568A-256
125 　 AS-568A-282
126 　 AS-568A-263
127 　 1/4" SUS GASKET
128 　 3/8" SUS GASKET
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