|
P/N |
Description |
P/N |
Description |
|
4022.436.15794 |
WH MOTOR-THETA GRIPPER |
4022.430.14451 |
REMOTE RESET BOARD |
|
SERV.435.67711 |
UV BLOCK FILTER 1000W / 1500W |
4022.436.64751 |
EXTERNAL REMOTE RESET BOARD |
|
SERV.454.26032 |
WAVE GUIDE FILTER ( WG 305 FILTER 1500W ) |
4022.437.02205 |
ODB board |
|
SERV.454.25772 |
WPS RECENTERING CHUCK |
4022.437.01472 |
TTL ELECTR. DEMODULATOR BOARD |
|
|
PAS /300 ENTERENCE OPTIC |
4022.430.12476 |
WS AMP PCB |
|
4022.454.71622 |
HP LASER DYNAMIC RECEIVER |
4022.430.12477 |
WS AMP PCB |
|
4022.502.27847 |
FLOPPY DRIVE 3.5" |
4022.436.87411 |
HINDS CONTROL SCANNERS BOARD |
|
4022.436.14913 |
WTS Y-MOTION MOTOR |
4022.436.88151 |
TIS ISI BOARD |
|
4022.480.62681 |
CLAMP/FREE CLEAN FUNC 2W |
4022.436.88161 |
TIMING CONTROL BOARD |
|
4022.480.63031 |
CLAMP/FREE FUNC 2W |
4022.437.2990 |
IL PID PPCA |
|
|
ZOOM AXICON MOTOR |
4022.437.29901 |
IL PID PPCA |
|
4022.454.94842 |
EMISSON DET. (WH ELEVATOR LASER ) |
4022.437.14551 |
|
|
4022.436.15755 |
GRIPPER MOTOR |
4022.436.45028 |
PID board |
|
|
STPPER TRANCEIVER |
4022.436.71143 |
ALIGNM.ANALOG TO DIGITAL PPCA |
|
|
MOU SET |
4022.436.22495 |
LEVEL OFFSET R2 BOARD |
|
4022.502.16577 |
WTS Y-BELT |
4022.436.22497 |
LEVEL OFFSET BOARD |
|
4022.436.18487 |
WS SLAVE BOX |
4022.436.33245 |
LEVEL LASER CONTROL BOARD |
|
4022.480.62711 |
PNUMATIC CONTRO AT BOARD |
4022.437.02181 |
Z-SENSOR DIGITAL BOARD |
|
4022.474.82971 |
HP FIBER |
4022.436.24922 |
DEMODULATOR ALIGNMENT BOARD |
|
4022.455.18691 |
|
4022.502.27941 |
HP VME AXIS 10897C BOARD |
|
4022.470.62862 |
TEMP SENSOR NTC ASSY |
4022.430.12391 |
INTERFEROMETER BOARD |
|
4022.436.19713 |
UPPER ROBOT ARMS FLAT CABLE |
4022.436.81311 |
VME 167-32B |
|
4022.436.18902 |
CONNECT. BOARD SENSOR ARMS |
MR AB29 |
High resolution Analog input |
|
|
CAM DISK MOTOT SET |
4022.436.26935 |
MOTION CONTROLLER |
|
SERV.454.89513 |
AIRMOUNT SERVOVALVE |
4022.436.26933 |
MOTION CONTROLLER |
|
4022.436.35175 |
EDGE SENSOR |
4022.436.17407 |
LEVELLING MASTER BOARD |
|
|
CAM DISK |
4022.436.17404 |
LEVELLING MASTER BOARD |
|
4022.455.23402 |
TIS PLATE |
4022.430.12257 |
TEMPERATURE MEASUREMENT BOARD |
|
4022.455.16351 |
OA RED DEMODULATOR |
4022.430.12137 |
Same |
|
4022.472.70111 |
OA LASER POWER SUPPLY |
4022.436.81161 |
|
|
GRAD FILTER /300 FROM RF360 |
4022.436.71621 |
SERV LEVEL CONTROL BOARD |
|
4022.437.3156 |
LEVEL SLAVE ACTUATOR ASSY |
4022.436.71143 |
ALIGNM.ANALOG TO DIGITAL PPCA |
|
4022.436.6768 |
SRS DIFF SENSOR |
4022.436.38492 |
IIB UV V2 BOARD |
|
4022.455.0185 |
SRS DIFF SENSOR MAGNETIC |
4022.436.78232 |
SYNC.BUS CONTROLLER BOARD |
|
4022.436.83791 |
LS LVDT SET / SWS |
4022.436.18973 |
IS & AL 32 CHANNEL BOARD |
|
4022.436.19704 |
CBY-CIH FLAT CABLE |
4022.436.17253 |
WH SECURITY BOARD |
|
4022.454.54371 |
BEAM DELIVERY ENTERENCE WINDOW |
4022.436.6099 |
POWER AMP CONTROLLER BOARD |
|
4022.454.48131 |
CYMER LENS A NEG CIL |
4022.471.76593 |
DOMO |
|
SERV.454.89513 |
AIRMOUNT SERVOVALVE |
MSR AB25 |
AVME 9110 |
|
4022.502.16577 |
Y-MOTION BELT REPL SET |
4022.430.12931 |
DIGITAL I/O AVME 9471 BOARD |
|
4022.435.09323 |
SWS STONE AIRFOOT |
4022.502.29285 |
HINDS CONTROL SCANNERS BOARD |
|
4022.436.19713 |
FLEXCABLE UR CIH-CBF-X1 ARMS |
4022.436.64672 |
MOTION CONTROLLER SCANNER |
|
4022.436.32031 |
NA MOTOT CABLE |
4022.471.63636 |
GENERIC POWER AMP PPCA |
|
SERV.502.27640 |
BENDING POINT MIRROR 110MM |
4022.436.41546 |
REMA POWER AMP BOARD |
|
4022.437.83841 |
HAL LAMP 12 V |
4022.437.24881 |
REMA POWER AMP BOARD |
|
4022.489.50013 |
MOTOR BELT GREPPER X-MOTION |
4022.436.85122 |
SSM POWER AMP |
|
4022.455.48171 |
AIRBEARING CONTROLLER W/F/G |
4022.436.41703 |
SSM POWER AMP |
|
4022.481.68041 |
AIRBEARING CONTROL RS AT |
4022.436.82803 |
SENSOR PLATE PREAMP SWS AA BOARD |
|
4022.455.67301 |
HF-LSM Z BEARING CONTROLLER |
4022.436.62992 |
Back panel board |
|
4022.454.20391 |
AL SHUTTER |
4022.436.62962 |
Back panel board |
|
4022.439.77651 |
O-RING SET |
4022.436.62992 |
Back panel board |
|
SERV.502.29068 |
EMISSON DET. (WH ELEVATOR LASER ) |
4022.436.6298 |
Back panel board |
|
4022.454.55301 |
SWS SITFOOT O-RING |
4022.436.62962 |
Back panel board |
|
4022.436.79613 |
LBR TO SHUTTER GF. LASER ASSY |
4022.436.62952 |
Back panel board |
|
4022.484.45185 |
REMAC-C |
4022.436.62922 |
Back panel board |
|
4022.484.45179 |
REMAC-C UV |
4022.436.62942 |
Back panel board |
|
|
6 SLOT RETICLE BOX |
4022.436.00991 |
Back panel board |
|
|
1 SLOT RETICLE BOX |
4022.436.62912 |
Back panel board |
|
4022.454.48131 |
LENS A |
4022.436.62932 |
Back panel board |
|
4022.454.18121 |
LENS B |
4022.436.62973 |
Back panel board |
|
4022.454.51644 |
BENDING POINT MIRROR 110MM |
4022.436.62932 |
Back panel board |
|
|
SUV-3500 SIL USHIO LAMP |
4022.436.62983 |
Back panel board |
|
4022.486.25403 |
Cymer XLA-165 BXP Lens C |
4022.437.00991 |
Back panel board |
|
SERV.486.25393 |
Cymer XLA-165 BXP Lens B |
4022.437.01131 |
Back panel board |
|
SERV.486.25383 |
Cymer XLA-165 BXP Lens A |
4022.436.62922 |
Back panel board |
|
SERV.502.28095 |
BXP Lens C Cymer /12X0 GPI /14X0 |
4022.436.63032 |
Back panel board |
|
4022.454.1365 |
GCU unit |
4022.436.63082 |
Back panel board |
|
|
WH Gripper comp. unit |
4022.436.62942 |
Back panel board |
|
|
RMR gripper unit |
4022.436.63013 |
Back panel board |
|
4022.454.6602 |
ARMS Upper gripper Z-module |
4022.436.62952 |
Back panel board |
|
|
SUN keyboard |
4022.436.63042 |
Back panel board |
|
|
SUN mouse |
4022.436.62973 |
|
|
4022.436.32581 |
X-to-R-Dz Gripper cable |
4022.430.14691 |
POWER SUPPLY +5V 20A |
|
4022.456.33151 |
HP- optical fiber |
4022.437.33301 |
MSAC IRIS BOARD |
|
4022.436.12031 |
WHR to Gripper robot cable |
4022.430.14452 |
REMOTE RESET BPARD |
|
4022.436.48111 |
Beam tube inter-lock cable |
4022.436.82941 |
MSAC IRIS BOARD |
|
4022.451.11263 |
Air quick tube |
4022.436.16152 |
POWER AMPLIFER ARMS BOARD |
|
4022.437.29581 |
WRR to WRR remove reset cable |
4022.436.16095 |
PAS LIBRARY CARD PPCA |
|
4022.437.29992 |
WWRC to REMA damper cable |
4022.436.16112 |
ROBOT ARMS BOARD |
|
4022.437.29921 |
WRR C MCB to CONN. Plate cable |
4022.436.60184 |
ROBOT SCAN ARMS BOARD |
|
4022.480.89622 |
HP E1706A IFM Fiber CONN.10MM |
4022.436.23101 |
SUPPLY 24V, 8A |
|
|
Airmount dither valve |
4022.436.16071 |
ARMS DC TO DC CONVERER PCA |
|
|
ARMS internal flat cable |
4022.436.23111 |
PRIMARY SWITCHER +5V/ +- 15V |
|
4022.437.29972 |
WWRC to AIR3 HSSL1 fiber |
4022.436.23392 |
PSU |
|
4022.437.29982 |
WWRC to AIR3 HSSL2 fiber |
4022.437.01132 |
CONNECTOR CP PCA |
|
4022.436.83105 |
|
4022.634.06832 |
IL PID MK3.2 PPCA |
|
|
Beam bending point |
4022.436.67273 |
VIDEO SWITCH PPCA |
|
4022.502.20314 |
MICROSCOPE LAMP |
4022.437.00991 |
CONNECTOR DN PCA |
|
SERV.436.33751 |
THERMO COUPLE ASSEMBLY |
4022.437.28792 |
850C DAMPER CONTROL PCA |
|
SERV.437.83841 |
LAMP HALOGEN 12V 100W (2X) |
4022.437.29011 |
HP MOTION CONTROLLER MK2 PPCA |
|
SERV.502.27071 |
Y-MOTION MOTOR (WH Y MOTOR ) |
4022.437.13125 |
ENH. ,MOTION CONTROLLER PPCA |
|
SERV.502.27071 |
LEVEL SLAVE ACTUATOR ASSY |
4022.436.63014 |
CONNECTOR PCB HMA |
|
SERV.502.28855 |
FLEXURES SET PRE-ALIGNM |
4022.436.6373 |
FB PREAMPLIFER TC3X BOARD |
|
SERV.435.67961 |
ALIGNM.LASER + SHUTTER |
4022.436.67272 |
VIDEO SWITCH PPCA |
|
SERV.502.32970 |
GRIPPER DZ-DRIVE ASSY |
4022.436.48011 |
PRIMARY SWITCHER +/- 15V /3A |
|
SERV.436.10635 |
WH MOTION 3 WHMC-3 BOARD |
4022.436.44791 |
SHUTTER BOOSTER BOARD |
|
SERV.458.01431 |
EDGE SENSOR MK2 ASSY |
4022.436.52151 |
POWER SUPPLY +/- 12V , 1A |
|
SERV.502.27006 |
LS LEVEL OFFSET R2 BOARD |
4022.436.30271 |
NA1 PAS PPCA |
|
SERV.435.24381 |
CLEANING/ENVIROMENT FUNCTION |
4022.436.1832 |
LEVEL ACT POWER SUPPLY R2.1 |
|
SERV.439.76941 |
COUPLING QC MM T20-6X4 |
4022.436.79311 |
PRIMARY SWITCHER 24V/1A 4TE |
|
SERV.454.65261 |
PRESSURE SENSOR |
4022.470.15763 |
EMO |
|
SERV.454.65272 |
VACUUM SENSOR |
4022.436.79583 |
OA RED TEMP.SENSOR |
|
SERV.502.33982 |
CLAMP/FREE FUNCTION 2W |
4022.436.79593 |
OA GREEN TEMP.SENSOR |
|
SERV.502.16656 |
LS DEMODULATOR BOARD |
4022.436.23221 |
PRIMARY SWITCHER +5V /60A |
|
SERV.436.33247 |
LEVEL LASER CONTROL BOARD |
4022.436.47431 |
VAR.ATTENUATOR CONTROL AL-DUV |
|
SERV.430.16566 |
E-PINS MOTOR ASSY |
4022.436.14761 |
PSU +5V |
|
|
LAMP ASML UV 100D 1500W |
4022.436.64421 |
PRIMARY SWITCHER +24V 5A (MSR) |
|
SERV.436.35843 |
IL AIR PUMP ASSY 220V 60Hz |
4022.436.14914 |
WTS Y-MOTION MOTOR |
|
SERV.435.03861 |
ROLLER BEARING ( Y-TOP ROLLER ) |
4022.436.72591 |
PSU 8V |
|
SERV.435.04171 |
ROLLER BEARING ( Y2 SIDE ROLLER ) |
4022.476.01151 |
PSU 15V / 12A / 14TE 3HE |
|
SERV.502.29032 |
X-Y SIDE ROLLER BEARING ASSY |
4022.476.01161 |
PSU 24V / 10A /14TE 3HE |
|
SERV.435.04041 |
|
4022.436.86101 |
PRIM.SWITCH 15V /1.6A 4TE |
|
SERV.435.04051 |
|
4022.476.01561 |
PSU +/- 15V / 2.5A(4A) / 60W / 8TE 3HE |
|
SERV.436.32581 |
CABLE X TO RZ GRIPPLER |
4022.476.01041 |
PSU 24V / 5A / 8TE 3HE |
|
SERV.502.27901 |
LS PLANE PLATE PROJ MOTOR |
4022.430.14801 |
PRIM.SWITCH +/- 15V / 3A |
|
FOCAL-0.25 SC |
454.41782 |
4022.436.48921 |
AM POWER SUPPLY 5V / 12V TC3X |
|
Skew Reticle |
NA |
4022.436.79311 |
PRIMARY SWITCHER 24V / 1A 4TE |
|
BA-COMBI |
455.40205 |
4022.476.02511 |
PSU 3V3 / 5V40A / 12V5 / 5A / 8T3H |
|
BA-COMBI |
455.40205 |
4022.436.79321 |
|
|
BA-XY-13X19 |
455.59892 |
4022.436.23221 |
PSU +5V -32A / 60A |
|
COMBI-5-21-22 |
450.2400.1 |
4022.430.14752 |
PSU 24V / 5A |
|
COMBI-5X |
450.24000.3 |
4022.430.14731 |
PSU 15V / 6.5A |
|
FOCAL-300 4X 0.25 |
454.40561 |
4022.430.19221 |
PWR SUPPLY 5V 7A +/-12V 1A |
|
BA-Z-MAP |
455.60042 |
4022.430.14771 |
PSU +/- 12V / 2A |
|
4X FOCAL-4XX |
FPD55004XX |
4022.436.23111 |
PRIMARY SWITCHER +5V/ +- 15V |
4X i-LINE (XY)SCANNER
RESOLUTION IMAGE |
8978RES4XX |
4022.436.81507 |
LSM POWER AMP BOARD |
|
5X FOCAL |
8753FPD5X |
4022.470.89413 |
PSDC 48V/25A ( PSU 48V 25A 147E 6HE ) |
|
5X OVERLAY REG22 01 |
8739REG22 |
4022.437.25521 |
LS PWR SUPP 375V/16A/24V/4A |
|
5X STAGE GRID CAL |
8752GRIDCALI |
4022.436.48601 |
AI-UV pnumatic box ( AAB SENSOR ASSY ) |
|
5X IMAGRING SETUP |
8736RES22 |
4022.437.31662 |
PADC 50V/8.5A PCA |
|
4022.437.25521 |
LS PWR SUPP 375V/16A/24V/4A |
4022.436.48011 |
VOLTAGE REGULATOR BOARD ( 7V ) |
|
4022.436.31662 |
PADC 50V/8.5A |
4022.436.49654 |
Z-SENSOR ALNALOG BOARD |
|
4022.471.6240 |
MHB PLUS HALF SPEED PPCA |
4022.437.02131 |
Z-SENSOR DIGITAL BOARD |
|
4022.430.12137 |
|
4022.436.78172 |
SENSOR BOARD |
|
4022.430.12258 |
TEMPERATURE MEASUREMENT BOARD |
4022.436.4620 |
RMR RACK |
|
4022.436.82941 |
MSAC IRIS BOARD |
4022.454.7728 |
FAN UNIT |
|
4022.436.33247 |
LEVEL LASER CONTROL BOARD |
4022.436.49191 |
DC/DC CONV 24V-15V 3.5A |
|
4022.436.22494 |
LEVEL OFFSET BOARD |
4022.436.49181 |
DC/DC CONV 24V-5V 10A |
|
4022.436.22712 |
LEVEL CONTROL 1 BOARD |
4022.436.71413 |
|
|
4022.436.18956 |
LEVEL CONTROL 2 BOARD |
4022.436.56273 |
|
|
4022.437.13123 |
HP MOTION CONTROLLER |
4022.436.49191 |
DC/DC CONV 24V-15V 3.5A |
|
4022.437.29011 |
HP MOTION CONTROLLER MK2 PPCA |
4022.436.48011 |
VOLTAGE REGULATOR BOARD ( 7V ) |
|
4022.437.29012 |
HP MOTION CONTROLLER MK2 PPCA |
4022.436.49654 |
Z-SENSOR ALNALOG BOARD |
|
4022.436.30271 |
NA1 PAS PPCA |
4022.437.02131 |
Z-SENSOR DIGITAL BOARD |
|
4022.436.18323 |
LEVEL ACT POWER SUPPLY R2.1 |
4022.436.78172 |
SENSOR BOARD |
|
4022.430.09911 |
DC/DC CONVERTOR 5/15V (22~125) |
SM 30 - 100D |
|
|
4022.430.0994 |
DC/DC CONVERTOR 24/15V (22~125) |
4022.436.46102 |
WRR RACK |
|
4022.430.0929 |
STEPP.MOT.LOG BOARD (22~125) |
4022.436.43082 |
|
|
4022.430.0672 |
SHUTTER ENCODER L.DRIVER PCB (22~125) |
4022.436.54003 |
CSU ( Cabinet Supply Unit ) rack |
|
4022.436.78174 |
WS SENSOR BOARD |
4022.453.13343 |
SUSPENSION CONTROL RACK ( Airmount rack ) |
|
4022.437.14573 |
ISB BOARD |
4022.436.63772 |
CURRENT AMP. TC3X ( DCPA 50/2 ) |
|
4022.436.71143 |
ALIGNM.ANALOG TO DIGITAL PPCA |
4022.430.14761 |
PRIMARY SWITCHER +24V / 2A |
|
4022.436.10955 |
MOTION 3 WHMC 5-6 BOARD |
4022.436.48921 |
AIRMOUNT POWER SUPPLY 5V / 12V TC3X |
|
4022.436.10944 |
MOTION 3 WHMC 2-4 BOARD |
SERV.502.27265 |
SCR CPU TC3X MASTER |
|
4022.436.10933 |
WAFER TRACK WH BOARD |
SERV.502.27002 |
FB PREAMPLIFIER BOARD |
|
4022.436.17404 |
LEVELLING MASTER BOARD |
SERV.502.29372 |
TEMP.SENSOR PREAMP.BOARD TC3X |
|
4022.436.26935 |
MOTION CONTROL BOARD MK2 |
SERV.502.27265 |
SCR CPU TC3X SLAVE |
|
4022.436.36851 |
CPU VME-147 |
SERV.502.27003 |
FF PREAMPLIFIER BOARD |
|
|
CPU VME-167-36SE |
4022.437.12281 |
SUSPENSION CONTROL RACK ( Airmount rack ) |
|
4022.436.16071 |
ARMS DC TO DC CONVERER PCA |
|
5517D-C19 HP laser |
|
4022.437.10242 |
AL shuteer control board |
4022.455.8274 |
R-pin unit |
|
4022.437.10232 |
AL LASER CONTROLLER RF PPCA BOARD |
4022.436.3351 |
Dipod unit |
|
4022.437.01815 |
ATTENUATOR CONTROLLER /200 |
|
5517C HP laser |
|
4022.436.4190 |
SENSOR CONTOLLER UV BOARD (22~125) |
4022.455.1663 |
OA- RED laser |
|
4022.437.0492 |
SENSOR CONTOLLER UV BOARD (22~125) |
SERV.455.09864 |
OA- GREEN laser |
|
4022.430.14771 |
PSU +/-12V / 2A |
SERV.455.09864 |
OA- GREEN laser |
|
4022.430.14741 |
PRIMARY SWITCHER +15V / 3.5A |
4022.435.67961 |
TTL Laser |
|
4022.437.10232 |
ALIGNMENT LASER CONTROLLER RF PPCA BOARD |
4022.436.46004 |
WRR RACK |
|
4022.436.37091 |
BLADE DRIVER CURRENT (22~125) |
4022.502.27941 |
HP VME AXIS 10897C BOARD |
|
4022.436.33412 |
TEMP CONTROL 1500W BOARD |
4022.436.64672 |
|
|
4022.436.7550 |
AAR RACK |
4022.436.70881 |
DIAGONOSTIC I/O BOARD VER.2 |
|
4022.436.87411 |
HIND CONTROL SCANNER BOARD |
4022.436.64751 |
EXTERNAL REMOTE RESET BOARD |
|
4022.437.13125 |
|
4022.436.6550 |
AERIAL ILLUMINATION RACK ( AIR ) |
|
4022.436.81161 |
|
4022.430.14752 |
SUPLLY +/- 24V 5A |
|
4022.436.71143 |
ALIGNM.ANALOG TO DIGITAL PPCA |
4022.430.14801 |
PRIMARY SWITCHER +/- 15V , 3A |
|
4022.436.88151 |
TIS ISI BOARD |
4022.436.52151 |
POWER SUPPLY +/- 12V , 1A |
|
4022.436.64751 |
EXTERNAL REMOTE RESET BOARD |
4022.436.47431 |
VAR.ATTENUATOR CONTROL AL-DUV |
|
4022.437.01473 |
TTL ELECTR. DEMODULATOR BOARD |
4022.436.43051 |
PRIMARY SWITCHER 24V, 13A |
|
4022.437.35421 |
DEMODULATOR BOARD ( ODB ) |
4022.436.23221 |
SUPPLY +5V , -32A |
|
4022.437.29935 |
DEMODULATOR BOARD ( ODB ) |
4022.430.14452 |
REMOTE RESET BOARD |
|
4022.436.4620 |
RMR RACK |
4022.436.45027 |
IL PID BOARD |
|
4022.454.7728 |
FAN UNIT |
4022.436.17404 |
LEVELLING MASTER BOARD |
|
4022.436.49191 |
DC/DC CONV 24V-15V 3.5A |
4022.436.45008 |
PTI BOARD |
|
4022.436.49181 |
DC/DC CONV 24V-5V 10A |
4022.437.1206 |
LPC UNIVERSIAL PPCA |
|
4022.436.71413 |
|
4022.471.88891 |
LAMP POWER CONTROLLER 3150W |
|
4022.436.56273 |
|
4022.436.37374 |
LAMP POWER CONTROLLER 3150W CL |
|
4022.436.49191 |
DC/DC CONV 24V-15V 3.5A |
4022.436.61511 |
LPC RACK |
