
| Model | Description | Code | Type |
| SSW-80A-A | 80A(3Front) Scrubber | 80A | |
| SKW-80B-AVPF | 80B Spinner(Part Machine) | 80B | |
| 9821X-MODEL2(NEC) | MAIN PC | 2-39-54433 | 80A/80B |
|
EEMP-0013 (EEBA-00265) |
MAIN OPERATION PANEL |
80A/80B | |
| CEDB-1013 | PCB | 2-VC-15252-1 | 80A (INDEX) |
| CERB-0016 | PCB | 2-VC-15254-1 | 80A (TR) |
| CESB-2011 | PCB | 2-VC-19075 | 80A (SPIN) |
| CESB-2012 | PCB | ||
| CESB-0012 | PCB | ||
| CEBB-201 | PCB | 2-VC-17799 | 80A(BAKE) |
| EERC-0011 | PCB | 2-VC-19090 | 80B(TR) |
| EESC-0012 | PCB | 2-VC-19115 | 80B (SPIN) |
| EEIC-001 | PCB | 2-VC-19284 | 80B(IF-B) |
| EEUC-0013 | PCB | 2-VC-18987 | 80B(EEW) |
| CEMI-0011 | PCB | 2-VC-09977-1 | PIO |
| FC-9801-06K | PCB | 2-39-48605 | RAS |
| CEMH-001 | PCB | 2-VC-09976 | SERIAL |
| CEML-0013 | PCB | 2-VC-10751-2 | LAN |
| SESI-104 | PCB | 629 | |
| SEIO-104 | PCB | 629 | |
| SEMR-104 | PCB | 629 | |
| EMS BOARD(EMJ-8000R) | PCB | 80B/A | |
| VACUUMLESS | ARM | 2-39-55386 | 8" |
| VACUUMLESS | ARM | 2-39-55389 | 6" |
| EESA-001(AU3575 N223) | SPIN SERVO AMP | 2-39-48133 | 80B (SPIN) |
| EESA-001A1(AU6356 N20) | SPIN SERVO AMP | 80B (SPIN) | |
| S8HM-1031(PVA)1BOX(10PCS) | BRUSH | 2-AJ-80487 | 8" |
| S8HM-1031NYLON)1BOX(10PCS) | BRUSH | 2-AJ-80486 | 8" |
| SPIN CHUCK | 2-F2-33159 |
DEV (8") |
|
| SPIN CHUCK | 2-F3-32084 | 6" | |
| CESD-001 | DRIVER | 2-VC-10369-1 | BRUSH/DSONIC |
| CESP-001 | MAINTENACE PANEL | 2-VC-10752-5 | 80A/B |
| CESP-OO1A | MAINTENACE PANEL | ||
| CESP-0018 | MAINTENACE PANEL | ||
| EESP-001 | MAINTENACE PANEL | ||
| 9EMH-0011 | BOX | D-SONIC | |
| KL77-S03 // S10 | SENSOR | DIW | |
| PS500 | UPS | 80A/80B | |
| 80A | SPIN HEAD UNIT | 80A | |
| 80A | AV/SV UNIT | 80A | |
| 9ELP-1011 | UNIT PANEL BOX | 629 | |
| TS3510N39E10 | MOTOR | 2-39-45543 | 80B |
| USAHEM-03DS32A | MOTOR | 2-39-40384(2) | 80A |
| TS4554N3E14 | MOTOR | 2-39-54184 | SK200 |
| PK564AW-T30 | MOTOR | ||
| UPH596-B | MOTOR | 2-39-39122 | TR- Y |
| PH544HG2-NB | MOTOR | 2-39-46433 | SCW NOZZLE(80B) |
| M049-9515NG | MOTOR | IF-B | |
| PK569AG | MOTOR | ||
| E6CP-AG5C-C | ENCODER | 2-39-44754 | SCW NOZZLE |
| D3173-124(2GK180K) | GEAR HEAD | 2-39-00643 | |
| 2GN50K | GEAR HEAD | 2-39-00637 | DSONIC |
| 2GN180K | GEAR HEAD | 2-39-00643 | BRUSH |
| D2168-102 | GEAR HEAD | 2-39-38907 | ID/IFB- X |
| UDX5114 | DRIVER | 2-39-44061 | IFB -Y |
| D-2620 | DRIVER | DSONIC | |
| 743 | WIRE | 2-F4-90304 | TR(80B) |
| 460 | WIRE | 2-F4-90301 | TR(80B) |
| BRUSH WASHING POT | 2-F3-86339 | 80A | |
| UNIT DRAIN HOSE | 2-F3-91082 | 80B | |
| UNIT DRAIN POT | 2-F3-91114 | 80B | |
| 2-F4-84904 | |||
| UNIT DRAIN HOSE | 2-F4-91702 | 80B | |
| 80B | |||
| 80A | |||
| 160mm | 2-F3-84552 | 80A | |
| 374mm | |||
| 264mm | |||
| 250mm | |||
| PIN | 2-J4-35537 | 80A | |
| Ø4/Ø3 | NOZZLE | 2-F4-93981 | 80B |
| NOZZLE COVER | 2-F4-87453 | 80A | |
| H=2mm |
CASSETTE BASE (INDEXER) |
2-J4-33366 |
80A (5,6") |
| H=2mm |
CASSETTE BASE (INDEXER) |
2-F4-92875 | 80B |
| SI NOZZLE | 2-39-45412 | 80B | |
| MESH | 2-F4-32281 | 80A | |
| ARM | 2-J4-32218 | 80A,B | |
| LIFTER PIN TIP | 2-J4-31471 | 80A,B | |
|
BLOCK (UNIT DRAIN) |
2-J4-31375 | 80A | |
| 2RSR7ZM+130L-2 | LM GUIDE | ||
| T5-10-132 |
TIMEING BELT (SYCHRO BELT) |
||
| T5-10-130 |
TIMEING BELT (SYCHRO BELT) |
||
| T5-10-110 |
TIMEING BELT (SYCHRO BELT) |
||
| T5-10-93 |
TIMEING BELT (SYCHRO BELT) |
||
| T5-10-80 |
TIMEING BELT (SYCHRO BELT) |
||
| 110-T80-6.4 |
TIMEING BELT (SYCHRO BELT) |
2-39-45691 |
INDEXER -Z (80A,B) |
| 180XL | 2-39-22373 | IFB -YZ | |
| 160XL | |||
| 186XL | |||
| ATP28XL050-A-N10 | |||
| O-RING | 2-39-48766 | 80A,B | |
| ORIFICE 0.3mm | NEEDLE | 2-39-38933-1 | 80B |
| EX-14A | SENSOR | ||
| E2KQ-X10ME1 | SENSOR | ||
| RS-1000F | SENSOR | 2-39-43737 | LEAK |
| LVP-P-A-2M | SENSOR | LEAK | |
| EE-1001 | SENSOR | 2-39-12352 | |
| EE-SX674 | SENSOR | KSP1-037584 | |
| EE-SX670 | SENSOR | 2-39-31529 | |
| SS-5GL2 | SENSOR | KSP1-037533 | CASSETTE |
| EX-F1 | SENSOR | LEVEL | |
| EX-13EB | SENSOR | ||
| E3C-JC4P | SENSOR AMP | 2-39-47779 | FLOWMETER |
| RS-1000C | SENSOR AMP | 2-39-41642 | LEAK |
| MS65L | GAUGE | 2-39-37884 | EXHAUST |
| MS65L | GAUGE | EXHAUST | |
| FR51-300D | GAUGE | 2-39-08929 | EXHAUST |
| DPX-200B | GAUGE | 2-39-39135 | VACUUM |
| MS-DPX-2 | GAUGE | 2-39-38713 | VACUUM |
| 7Kgf | GAUGE | N2 | |
| 5Kgf | GAUGE | N2 | |
| 5Kgf | GAUGE | AIR | |
| INA-14-118 | SPEED CON. | ||
| INA-13-815 | REGULATOR | 2-39-22225 | N2 |
| AR2000-02(171-005) | REGULATOR | 2-39-36940 | AIR |
| INA-13-707 | REGULATOR | 2-39-05923 | N2 |
| AR20-02H | REGULATOR | ||
| AR2060-02BG-10-01 | REGULATOR | ||
| AR111-01-X271 | REGULATOR | 2-39-05912 | AIR |
| 040M9A | MANIFOLD | 2-39-31489 | SV |
| 040M13A | MANIFOLD | 2-39-38286 | SV |
| SS3YJ3-42-04-C4 | MANIFOLD | SV | |
| LIQ 2L/M 1/4B | FLOW METER | 2-39-47352 | |
| LIQ 1L/M 1/4B | FLOW METER | 2-39-47351 | |
| LIQ 500CC/M 1/5B | FLOW METER | 2-39-47350 | |
| 96-44005 | FLOW METER | KSP1-018227 | EBR |
| LIQ 1L/M 1/4B VIT | FLOW METER | KSP1-013663 | |
| LIQ 500cc/M 1/4 | FLOW METER | KSP1-017869 | |
| NI/min 0.2MPag(20) | FLOW METER | N2 | |
| NI/min 0.2MPag(30) | FLOW METER | N2 | |
| L/min 1Kg/Cm2 (10) | FLOW METER | N2 | |
| NV100CF-3P-60AT-200V-30MA | BREAKER | 2-39-46062 | 80A |
| 2P20A100/200V 30mA | BREAKER | ||
| CQ2B32-20DC | CYLINDER | 2-39-35313 | AUTO DAMPER |
| CDJ2B16-80 | CYLINDER | KSP1-008461 | DSONIC |
| ADF-16-30-P-A-KF | CYLINDER | KSP1-030371 | |
| CBVZ6OP1 | FILTER | DIW | |
| WG2FT1SS2 | FILTER | N2 | |
| UV | FILTER | EEW | |
| MD-15RM-EN | IWAKI MAGNET PUMP | ||
| AMG01-X0385-K | VALVE | PR | |
| AMDSZ0-X0377-K | VALVE | ||
| AMD00-X6US-4 | VALVE | 2-39-45734 | |
| AMD01-6-4-2D | VALVE | 2-39-42334 | |
| AMD01-X2D-0 | VALVE | 2-39-22269 | |
| AMD11-X5D-0 | VALVE | 2-39-32039 | |
| AMDSZ0-X0342-K | VALVE | SUCKBACK | |
| TMDZ02-6-2 | VALVE | KSP1-033371 | VENT |
| AMD13-X1514-K | VALVE | ||
| AMD31-15BUS-10-0-4 | VALVE | ||
| AMD11-X5D-0 | VALVE | 2-39-32039 | |
| AMD35-15BUS-10-FX-2 | VALVE | ||
| AMDZ1-X0415 | VALVE | 2-39-45771 | |
| AMD01-A6US-4 | VALVE | 2-39-45725 | |
| AMD13-A8US-6 | VALVE | 2-39-45733 | |
| VZA2220-M5-X2 | VALVE | 2-39-22607 | VACUUM |
| 1/8M(PF)X3 | NOZZLE ADAPTER | 2-39-50035 | JET NOZZLE |
| AC7A-F | BAFFLE DISK | 2-F2-33117 | 6" SCRUBBER |
| AC7A | BAFFLE DISK | 2-F2-33385 | 8" SCRUBBER |
| 6" | SPIN CUP LOWER | 2-F1-30874 | |
| DRAIN PIPE | 2-F3-83345 | COATER CUP | |
| 8" BACKSIDE | SPLASH GUARD | 2-AJ-80741-1 | 80A |
| EEBM-0011 | HETER CONTROLLER | 80B | |
| CEEI-0012 |
IF-B CONROLLER BOX(STEPPPER) |
80B | |
| CEEI-0011 |
IF-B CONROLLER BOX(STEPPPER) |
80B | |
| PFA | TUBE | 500 | |
| PFA | TUBE | 500 | |
| PFA | TUBE | 100 | |
| PFA | TUBE | 230 | |
| PFA | TUBE | 300 | |
| PFA | TUBE | 100 | |
| PFA | TUBE | 10 | |
| PFA | TUBE | 100 | |
| PFA | TUBE | 30 | |
| PFA | TUBE | 40 | |
| Constant Temp water | TUBE | 100 | |
| AIR | TUBE | 100 | |
| AIR | TUBE | 50 | |
| INDEX CERAMIC ARM (8") | 80A INDEX ARM | 2-39-55836 | 60A/80A Scrubber |
| 0IK1GK-A3 | BRUSH ROTATION MOTOR | 2-39-00549 | 60A/80A Scrubber |
| D-240 | BRUSH ROTATION MOTOR DRIVE | 2-39-33706 | 60A/80A Scrubber |
| PH266-01GK-C5,2GK180K | BRUSH SWING MOTOR | 2-39-36275 | 60A/80A Scrubber |
| 2CSMGK-101,2GK30K | JET SWING MOTOR BLOCK | 2-39-00605 | 60A/80A Scrubber |
| STEPDOWN TRANSFORMER | STEPDOWN TRANSFORMER | 2-VC-14563 | 60A/80A Scrubber |
| UPH566H-B-A25 | 80A TR VERTICAL MOTOR | 2-39-44434 | 60A/80A Scrubber |
| USAHEM-03DS31 (FRONT-SIDE) | 80A SPIN MOTOR | 60A/80A Scrubber | |
| USAHEM-03DS51 (BACK-SIDE) | 80A SPIN MOTOR | 60A/80A Scrubber | |
| PT-005J 1A (NOZZLE 포함) | D-SONIC GENERATOR | 2-39-52966 | 60A/80A Scrubber |
| 10PCS/SET | PVA BRUSH | 2-AJ-804871 | 60A/80A Scrubber |
| MEIDEN UD406/051A | GEM CONTROL MONITOR | 60A/80A Scrubber |