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AMAT_LAM_TEL_SpareParts

작성자: Robert 날짜: 2019-11-26 조회: 8756
Part Number Description
0242-00955 KIT, MAINFRAME,CATHODE TEMP SENSOR
0020-31164 RING,FOCUSING, ALUM,150 MM, PRSP 3
0200-30223 PLATE GAS DISTRIBUTION 133 HOLES
0200-20219 COVER RING 8"
0200-09474 RING, COVER,150MM POLY/ STAL,FLAT,RE:020
0200-00354 RING PURGE WXZ+ FC NOTCH
0242-22481 KIT, CONDUCTIVE LIFT PINS, IX/IS 200MM
0200-00043 QUARTZ COVER 6" POLY .40
0200-00036 RING COVER
0200-00025 GAS RING 8 XTAL
0040-04221 LID, LEXAN, SLIT LINER DOOR
0020-09284 FLAG, COMB SENSOR 3/16" PITCH
0150-03304 CABLE ASSY, AUXILLARY GROUND STRAP, EMAX
0020-17113 COVER, MOD, CATHODE BASE, ULTIMA HDP
0200-09828 RING FOCUS EXC, 200/201 MM, W, NOTCH, WE
0040-03261 FTG, BARATRON, EMAX
0100-20147 PCB ASSY MNFRAME DUAL DEGAS LIFT INTCONN
0820-00102 DETECTOR, OPTICAL SMOKE SENSING HEAD
0200-00261 CHAMBER INSERT 200MM TXZ CIP
0010-12811 TxZ HEATER LIFT BKM-3/HP
0020-20223 PLATE, GAS DISTRIBUT , 2-12150000-18 REV:G-
0020-32036 PLATE BLOCKER 100 SX, UNIVERSAL CHAMBER
0020-32318 GAS DISTR PLATE, 37 HOLES, OXALIC, 5-7 MIL, EGEC
0040-04221 CHAMBER MISC (LID, LEXAN, SLIT LINER DOOR)
0200-36105 CHAMBER INSERT 200MM TXZ CIP
3870-01000 VALVE ASSY THROTTLE MxP + 200MM, GEAR TYP
0970-01002 ISOL WATER COOLER RPS
0010-10980 ASSY, TOP LID, RPS
0190-70060 wMAGNET DRIVE ASSY( sierracin Magnedyne 1100-0051-00 Magnet Driver)
0015-09091 PHASE ANGLE CON
0190-76048 PWR SUP, RF 1250W 13.56MHZ 200/208VAC
[크기변환]KakaoTalk_20190315_150412591.jpg
0190-09246
wMICROWAVE TUNER,3-STUB,MANUAL,ASP
0190-09227 PLASMA APPLICATOR, PRSP
0190-09275 WAVEGUIDE, E-BEND,LOWER ASP
0020-19003 INSERT , SLIT VALVE SHO
0040-45164
0040-45206		 ESC ASSY 200MM FLAT
0040-45164
0040-45205		 ESC ASSY 200MM FLAT
0040-00876
0040-05592		 E-Max 200mm ESC Chuck EMXP+ Dual Zone
0200-00261 CHAMBER INSERT 200MM TXZ CIP
0010-12860 HEATER LIFT ASSY , DXZ
0190-76005 OMS BD
0100-00793 VGA Video Controller PCB Card
0100-20173 STEPPER CONTROLLER BD ASSY
0190-70102 VGA VIDEO CONTROLLER BD
DaView-500MX(MB945) AC220V 60Hz Power
NEC PC-9801ES 　
NEC PC-9801B 　
0035-00074 COVER TOP SHIELD
0020-32318 GAS DISTR PLATE, 37HOLES OXALIC, 5-7 MIL
0021-04318 LINER PUMP PORT THROTTLE VALVE, EMAX 200
0200-09448 PLATE,QTZ,GAS DIST, LOWER, 150MM, PRSP3
0200-09219 COVER,RING,QUARTZ,5" METAL ETCH CHAMBER
0200-09005 WINDOW, QUARTZ
0200-00057 WINDOW,SMALL STD WINDOW
0021-13723 FLANGE, BLANK, THROTTLE VALVE, EMAX, 200
0020-30652 COVER  PEDESTAL  OX/MLR/ NIT
0020-09026 CLAMPING CYLINDER
0020-03696 CLAMP RING, 6, DF
0020-35475 CAPTON PADS NEW
0020-32036 PLATE BLOCKER .100SX UNIVERSAL CHMBR,MES
0200-09025 TUBE, QUARTZ 6MMX6.38
0010-04322 ASSY, SLIT VALVE DOOR, EMAX 200MM
0020-09604 HOUSING
0190-09459 CABLE ASSY, FIBER OPTIC 20 FT
0020-09458 PLATE, UPPER TRAY ELEVATOR 125MM
0200-36105 CHAMBER INSERT 200MM TXZ CIP
0010-01442 Microwave Endpoint Detector
0100-70008 Heat Exchanger AC Box
3691-01557 SCR CAP SKT HD 6-32 X 5/8L TORX
Thermo Electron Newington
MX +500W		 Power : 208V 60Hz 3PH /200V 50HZ 3/PE
RATED CURRENT : 24A
Weight : 15.3 LBS(6.9Kg)
0190-22925 CX-1250S , COMDEL RF 13.56MHz/1.25W
0190-25699 AE Pinnacle 10KW DC Power , AE 10KW RING-LUGS
718-094756-081 　
715-011912-083 plate baffle upper
715-28554-002 ESC plate 
715-011531-009 Electrode Al , Anodized 
　 upper Ceramic Ring
131357600 Top Plate 8 inch
716-330191-082 Focus Ring 8" ESC
716-028240-066 Focus Ring 8" ESC
716-330504-081 Focus Ring 8"
853-017634-101 Solenoid Release
660-091820-001 24V power Supply
853-012230-002 Gate inner
853-441119-002 optical end point detector
853-330282-600 RF sensor low Match
881-520470-7 　
1881-022001-18 System I/O 2
881-62060-3 tSBC-ACRTC
881-520480-5 　
DSB-86/36A (9139) 　
881-521480-5 　
1881-022003-1D OPERATOR I/F BOARD
A31035C550 EPD Monitor Board
0040-22360 BRACKET, ISO AMP MODULE
0040-22274-A ADAPTER, REV 4.3/4.2 VECTRA IMP
0040-20033 ADAPTOR TURBO/PRECLEAN INTERFACE
0020-31422 BRKT,MTG,MAG GEN INTERFACE, ASP 
0020-26967 PC II GAS TRENCH COVER 
0020-25694 BLOCK MTG HEATER 1.18 DIA SFT MTR LIFT 
0020-22414 8" CHUCK, TC
0020-22363 SHAFT, LIFTER, TC
0020-21221 HOOP CD 200MM
0020-20500 SHIELD CRYO,ROUND
0020-20340 DOOR TRANSFER SLIT VALVE
0020-13976 BLOCK, MOUNTING BOTTOM, SENSOR LLKB, WBL
0020-13975 BLOCK, MOUNTING, TOP SENSOR LLKB, WBLL
0020-13974 BLOCK, MOUNTING, BOTTOM SENSOR LLKA, WBL
0020-13973 BLOCK, MOUNTING, TOP SENSOR LLKA, WBLL
0010-09292 ASSY, TC AMP HOUSING GENERIC
0010-13149 ASSY.4" WAFER SENSOR LOW PROFILE
0010-20138 ASSY TC AMP HSNG
0015-20124 SCR 1/4 - 20 X 1 TITANIUM VENTED FLAT HE
0020-10193 PLUG SHANK THRTL VLVE
0020-24236 CLIP SPRING PC II ANTENNA DOWELL
0040-20292-001 SHORT FEED, LAMP
0090-03861 LOADLOCK BRAKE INDEXER
0150-39369 CABLE ASSY, TC GAUGE, POS 'C' CENTURA
0190-09230 SW,15" HG,7/16-20 SAE/MS,OPEN DECREASING
0190-30355 Light Pen
0200-01668 Filer 650MM Orienter Laser
0690-01843 CLAMP TGL FLG SST 100LBS LONG HDL W/VINY
1310-01047 TC    PROBE K-TYPE 7/16-20 TEF INSUL
1400-01047 SNSR SMOKE DETECTOR SENSING HEAD
3030-05392 CNTRL FLOW MON SIGNAL PROCESSOR 1 CHAN
3310-01055 GAUGE CONVECTRON TUBE 1/4 FVCR
3700-03162 SEAL  ASSY FLANGED 1.218ID 1.853OD .250X
3700-03163 SEAL  ASSY 1.218ID 1.436OD .254X.218CS
3800-00130 #N/A
3870-01310 VALVE PURGE PUSHBUTTON
3870-01515 VALVE FINE MTR 1/4 VCR VERNIER HDL
3870-01669 VALVE CHECK 2PSID 1/4VCR 7RA MAX
4020-01160 FLTRIN-LINE GAS 3750PSIG 1/4VCR-MM 5SLM
4020-01285 USE 4020-01285 FLTR GAS 1000PSIG 1/4MVCR
0040-01103 PEDESTAL COOL DOWN
0020-39201 MOUNTING BLOCK COVER
0035-00087 WAFER LIFT MOUNTING BLOCK
0021-03724 CENTER FIND FLANGE
0020-25225 CAP 8" ZX HEATER
0020-29206 BUSHING COIL SUPPORT, VECTRA IMP
0020-26900 HEAT SHIELD HTHU HEATER RIGHT
0020-26899 HEAT SHIELD HTHU HEATER LEFT
3300-02263 FTG RLF VALVE VENT APTR CRYOPUMP AL
0020-41092 ACTUATOR SAFETY VALVE
0020-21688 CLAMP WINDOW CCD SEE
0020-22079 HOLDER FINGER CD/PT
0020-20752 FINGER HOOP 200MM CD
3870-01325 VALVE ADATOR PRESS REL CRYOPUMP/CASS LOA
0040-20198 ELBOW 2XKF 25 ,VCR 1/4 MALE
0020-20523 CAP, LAMP FEEDTHRU
0020-22413 LOWER COVER, SLIT VALVE BELLOWS
0020-21693 BLOCK LASER
0020-20342 PIVOT TRANSFER SLIT VALVE
0020-22414 8" CHUCK, TC
0020-23441 BRACKET PLUMBING MOTORIZED LFT
0020-20500 SHIELD CRYO,ROUND
0021-10789 BRACKET, TXZ SLIT WINDOW
0020-22387 8"HOOP WITH TC
0020-23836 PLATE ADAPTER CLAMP G-12
0020-40723 ADAPTER, LHS/RHS PLATFORM
0020-40044 CLAMP, BASE 150MM/200MM, PLATFORM
0040-20165 BRACKET VCR CROSS
3300-02155 FTGTBG TEE UNION FLANGE NW25KF SST304
0020-24291 MOUNTING PLATE PC 2 RF MATCH
0040-87410 ADAPTER, WIDE BODY INDEXER CMF CENTURA
0020-20700 CLAMP END AR FLEX 8" GATE VALVE
0030-70046 MACHINING, BRKT CLAMP SOURCE
0040-52152 BLADE, SHUTTER, 8" TA/BESC W/PIN 
0020-20587 INSERT, SLIT VALVE MACHINED
0020-05605 ORIENT CHAMBER LIFT HOOP 8.0INCH
0040-01110 MOUNT DOOR TRANSFER SLIT VALVE 
3300-02260 FTG TEE 2.75 CONFLAT SST 2.75 X 2.46
0021-36081 CLAMP,PERF PLATE TxZ
0021-36164 RF ISOLATOR CLAMP TxZ
0020-40779 BLOCK, CYL MT, LLC
0020-29334 CLAMP, INSERT INSULATOR
0020-24265 PLATE STOP WAFER LIFT PRECLEAN 2
0020-24890 LIMITER WAFER LIFT PC II
0020-13607
0020-13606		 BRACKET, TTF CLAMP HOLD, COMMON CENTURA
BRACKET, TTF BASE HOLD, COMMON CENTURA
0020-22412 UPPER COVER, SLIT VALVE BELLOWS
0020-27455 DISK  8" ADVANCED 101 SHUTTER
0020-13998 PLATE, SOURCE ALIGNMENT PIN
0020-23487 BRACKET MOUNTING 2-PHASE DRIVER
0020-27123 PEDESTAL, PCII 8" SNNF
0021-35897 ENCLOSURE INTLK TC AMP TXZ MCVD
0020-22844 PEDESTAL SHIELD, 8" PRECLEAN
0020-76384 INTLK TRIP BRACKET, PCII RESN
0020-13999 BRKT, SOURCE ALIGNMENT PIN
0020-21035 BRACKET SOURCE WATER LINE
0021-35920 HOUSING,RF ADAPTER,TxZ MCVD
0020-21691 PLATE 8" CCD VACUUM SEAL
0020-34617 PLATE,MTG,T/C AMP
0040-62802 BRACKET, MOUNTING, 5-PHASE DRIVER
0020-22922 BRKT MN/FRM SMOKE SENSOR MTG
0020-75980 COLLAR, 1.18' SHAFT, HTESC HTR ISOLATOR
0020-20343 CYLINDER ADAPTER TRANSFER SLIT VALVE
0020-21043 COVER, SWITCH W/ CONNECTOR
0020-23442 COVER PLUMBING MOTORIZED LFT
0020-22296 COVER ORIENTATION PCB
0020-22295 BRACKET MTG WADER ORIENTATION PCB
0021-76742 OUTRIGGER SUPPORT BAR,SMIF INTERFACE,CEN
0021-76885 BRACKET,INTERFACE,LLB SIDE ,SMIF
0021-76886 BRACKET,INTERFACE,LLA SIDE ,SMIF
0020-22879 ENCLOSURE, SHUTTER
0020-27103 LIFT HOOP 8" HEATED 101
0040-20136 MANIFOLD, H20 SOURCE 13"
0020-23437 BLOCK MOUNTING HEATER MOTORIZED LIFT
0020-23473 CLAMP HEATER MOTORIZED LIFT
0020-75740 LOAD LOCK OUT OF WAFER SENSOR
0020-20810 CLAMP RF CONNECTOR
3030-04879 SNSR FLOW INSERTION SST
0040-76368 MANIFOLD SHORT
3300-04298 FTG TBG CONN 9/16-18MP X 11/16-16
0040-76073 ARM, WLDMT SOURCE WIDE BODY CHMBR
0020-23286 COVER INSULATOR TIN 8"
0020-23621 FRAME SOURCE G12
0010-00975 　
0100-35103 MAG GEN INTERFACE ASP
0010-35049 ASSY, BOX, MAIN AC DISTRIBUTION
0100-35054 PCB ASSY,CHMBR INTERFACE
0190-70109 ASSY, PCB ASP CHAMBER INTERFACE
0100-65054 　
0100-20004 wPCB ASSY, CHAMBER INTERCONNECT
0100-76259 ASSY PCB WAFER ORIENTER CONTROLLER BD
0100-20012 PCB ASSY, ISOLATION AMPLIFIER
0100-09222 CHAMBER INTERFACE BOARD ASP
0100-35279 PCB ASSY, LOAD LOCK BEEPER
0660-01699 CONNECTRON GAUGE 8CB USED
0100-02016 PCB ASSY, ANALOG SYNC DETECT
0100-35082 PCB ASSY CHAMBER INTERCO A&C CENTURA MXP
0100-35083 PCB ASSY CHAMBER INTCNCT B&D CENTURA MXP
0190-70103 PCB ASSY ANALOG MONITOR LIGHT PEN
0100-76280 200MM SMIF INTERLOCK BOARD
0200-23479 　
0020-23350 SHIELD RF HEATER TOP MTRZD LEFT
0020-23470 BLOCK MOUNTING GUIDE SHAFT MOTORIZED
0040-20727 TUBE FLANGED HTR RF LOWER ESC/HT HTR/P
0040-20726 SHIELD,HTHU HEATER RF TOP
0021-23198 HOOP, LIFT OPENS 8" MCA E-CHUCK
0010-09174 ASSY THRVL VALVE 200MM, DOWNSTR,VI ORING
0010-10556 MONOCROMATOR MODULE ASSY-P/C ENDPNT 19"
0010-37804 THROTTLE VALVE ASSEMBLY, TEOS, DOWNSTREA
0040-31953 ADAPTER,GV,LOWER CHAMBER,DPS MEC
0190-17853 300MM ROBOT DRIVER ELA-B014CFL-03
?? 　
0010-21844 MAGNET ASSY DURASOURCE TTN ENCAPSULATED
0020-22982 ADAPTER TIN 8" WAFER CHAMBER 16"
0190-09419 DRIVE SINGLE PHASE, PHASETRONICS
0010-13629 ASSY, B101 MOTORIZED LIFT
0010-70271 ASSY 101 WAFER LIFT
0040-02938 GAS MANIFOLD OUTPUT 200MM TXZ CIP
0010-21154 ASSY PUMP INTERFACE BOX
　 　
0021-36719 BULKHEAD,WATER,LOWER CHAMBER,MAIN,DPS
0040-20133 COOLDOWN FLANGE
0010-70334 CENTURA SCREEN BAFFLE ASSEMBLY
0020-41227 FLAG, Z DIR. INDEXER
0020-23203 CUP, RF MATCH INTERLOCK
0020-23204 FOUNDATION,RF MATCH INTERLOCK
0190-13332 CRYOPUMP, OB 8F FR W/RECSSD HTR LD
0020-22126 COVER LIFT PVD
0020-20667 MOUNT LIFTER BEARING
0020-21826 CLAMP VIEWPORT DETECTOR
0010-21529 6" 101 Heater Ass'y
3870-01334 VALVE PNEU-ACT RTANG 1"OD NW25 AIR-OPEN/
0040-76073 ARM, WELDMENT, SOURCE, W/B
0040-20257 ASSY LIFT HOOP 8" WIDE BODY CHAMBER
0090-35731 ASSY, STPR MTR DRIVER, ASP+ ENHANCED LIF
0020-25226 OBS: HOOP, HTHU 8" HEATER
0020-20462 VIEWPORT COVER TRANSFER CHAMBER
0030-70084 HOLDOWN RING,VIEWPORT
0090-35731 ASSY, STPR MTR DRIVER, ASP+ ENHANCED LIF
0242-00955 KIT, MAINFRAME,CATHODE TEMP SENSOR
0020-31164 RING,FOCUSING, ALUM,150 MM, PRSP 3
0200-30223 PLATE GAS DISTRIBUTION 133 HOLES
0200-20219 COVER RING 8"
0200-09474 RING, COVER,150MM POLY/ STAL,FLAT,RE:020
0200-00354 RING PURGE WXZ+ FC NOTCH
0242-22481 KIT, CONDUCTIVE LIFT PINS, IX/IS 200MM
0200-00043 QUARTZ COVER 6" POLY .40
0200-00036 RING COVER
0200-00025 GAS RING 8 XTAL
0040-04221 LID, LEXAN, SLIT LINER DOOR
0020-09284 FLAG, COMB SENSOR 3/16" PITCH
0150-03304 CABLE ASSY, AUXILLARY GROUND STRAP, EMAX
0020-17113 COVER, MOD, CATHODE BASE, ULTIMA HDP
0200-09828 RING FOCUS EXC, 200/201 MM, W, NOTCH, WE
0040-03261 FTG, BARATRON, EMAX
0100-20147 PCB ASSY MNFRAME DUAL DEGAS LIFT INTCONN
0820-00102 DETECTOR, OPTICAL SMOKE SENSING HEAD
0200-00261 CHAMBER INSERT 200MM TXZ CIP
0010-12811 TxZ HEATER LIFT BKM-3/HP
0035-00074 COVER TOP SHIELD
0020-32318 GAS DISTR PLATE, 37HOLES OXALIC, 5-7 MIL
0021-04318 LINER PUMP PORT THROTTLE VALVE, EMAX 200
0200-09448 PLATE,QTZ,GAS DIST, LOWER, 150MM, PRSP3
0200-09219 COVER,RING,QUARTZ,5" METAL ETCH CHAMBER
0200-09005 WINDOW, QUARTZ
0200-00057 WINDOW,SMALL STD WINDOW
0021-13723 FLANGE, BLANK, THROTTLE VALVE, EMAX, 200
0020-30652 COVER  PEDESTAL  OX/MLR/ NIT
0020-09026 CLAMPING CYLINDER
0020-03696 CLAMP RING, 6, DF
0020-35475 CAPTON PADS NEW
0020-32036 PLATE BLOCKER .100SX UNIVERSAL CHMBR,MES
0200-09025 TUBE, QUARTZ 6MMX6.38
0010-04322 ASSY, SLIT VALVE DOOR, EMAX 200MM
0020-09604 HOUSING
0190-09459 CABLE ASSY, FIBER OPTIC 20 FT
0020-09458 PLATE, UPPER TRAY ELEVATOR 125MM
0200-36105 CHAMBER INSERT 200MM TXZ CIP
0090-76133 ASSY,ELECT,SBC SYNERGY 68040 CPU WITH 16

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