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AMAT Surplus Parts List

작성자: Eric 날짜: 2019-03-14 조회: 11077
Item Part Number Part Description
1 0200-39140 RING, FOCUS, 195MM SNNF 1" 60DEG, DPS
2 0200-36685 RING,SINGLE,LOW PROFILE,200MM SNNF,CERAM
3 0200-10378 RING SINGLE 195MM JEIDA FT CER DPS CHMB
4 0200-50119  
5   CERAMICS PROCESS
6 0200-10446 INSERT RING.SILICON,200MM,NOTCH(2),SI/QT
7 0200-10194 SHIELD, TAPERED, 200MM
8 0200-09759 SHIELD, 150MM PEDESTAL, AL, FINGER
9 0200-09746 COLLAR AL 200MM CERAMIC
10 0200-09765 COLLAR,200MM PEDESTAL, NOTCH,AL,FINGER
11 0200-20219 COVER RING 8"
12 0200-00354 RING PURGE WXZ+ FC NOTCH
13 0021-09795 LID,TRENCH-NARROW GAP
14 0021-13723 FLANGE, BLANK, THROTTLE VALVE, EMAX, 200
15 0040-04221 LID, LEXAN, SLIT LINER DOOR
16 0200-00043 QUARTZ COVER 6" POLY .40
17 0200-00036 RING COVER
18 0200-09346 COVER WRAPAROUND QTZ OX/MLR/NIT
19 0200-09219 COVER,RING,QUARTZ,5" METAL ETCH CHAMBER
20 0200-00025 GAS RING 8 XTAL
21 0010-10970 ASSY,VDS ,750SCCM, CENTURA
22 0200-09215 RING, PEDESTAL, QUARTZ, 5", METAL ETCH C
23 0021-04318 LINER PUMP PORT THROTTLE VALVE, EMAX 200
24 0035-00074 TOP SHIELD
25 0020-37817 COVER PLATE EXHAUST
26 0020-30223 PLATE GAS DISTRIBUTION 133 HOLES
27 0020-38890 COVER, CATHODE,DPS
28 0020-32318 GAS DISTR PLATE, 37HOLES OXALIC, 5-7 MIL
29 3300-04534 FTGEL STRN-RLF .770-.895D 1"HUB LIQ-TIGH
30 0242-09422 KIT, LEAK-CHECK, THROTTLE VALVE BLANK-OFF, DPS
31 0020-34694 LINER, GDP, R2 OXIDEGECO
32 0010-04322 ASSY, SLIT VALVE DOOR, EMAX 200MM
33 0270-01735 UPPER LINER REMOVAL FIXTURE
34 0240-61040 KIT, HARN ASSY KIT FOR 1/2 RACK TURBO CONTROLLER
35 0020-31830 PLATE,ADAPTER, ETCH CHAMBER TOP COVER
36 0021-04313 FLAP, TOP, MAIN, THROTTLE VALVE
37 0242-22481 KIT, CONDUCTIVE LIFT PINS, IX/IS 200MM
38 0021-23213 LIFT PIN, FAST LIFT, 200MM, EMAX
39 0021-07089 MANIFOLD, WATER, CHAMBER LINER
40 0020-04038 PLATE, RF MATCH BOX
41 0021-07079 COVER CATHODE LINER COOLING
42 0021-04312 FLAP, TOP, SECONDARY, THROTTLE VALVE
43 0021-13406 CLAMP,LINER GROUND STRAP, 200MM EMAX
44 0020-32118 PLATE, FRONT, THROTTLE VALVE DRIVER
45 0200-00071 INSULATING PIPE,QUARTZ,200MM,EXT,NEW,SEALED
46 0020-03398 *INSULATING PIPE
47 0200-09445 LINER, QTZ,UPPER, GAS DIST, PRSP3
48 0020-31057 RING FOCUSING .37 HT LEXAN ALUM 125MM FL
49 0200-09474 RING, COVER,150MM POLY/ STAL,FLAT,RE:020
50 0200-10246 UNI-INSERT,GDP,LINER,88 HOLD, QTZ
51 0200-04180 COVER QUARTZ,8,EXT
52 0200-18093 NOZZLE, ALL CERAMIC 2.55L, 1.5% HDPCVD,
53 0020-30478 RING,BAFFLE,METAL ETCH
54 0020-20439 VIEWPORT, COVER BUFFER/WAFER ORIENTER
55 0040-45164 ESC ASSY 200MM FLAT
56 0040-09961 PEDESTAL,200MM NOTCH,IS,NI LIFT2,HVCEN,.
57 0040-00876 E-MA 200MM ESC CHUCK
58 0040-32042 BASE,WELDMENT 200MM, ESC, SIMPLE CATHODE
59 0020-39087 PEDESTAL, ESC 195MM, 8" NOTCH, DPS
60 0040-09798 SHELL ASSY 200MM NOTCH
61 0010-10327 SHELL ASSY,200MM,NOTCH(2 5MIC,0.8"THK,SI
62 0020-39834 PEDESTAL, 195MM FLAT, ESC, SIMP CATH, MXP
63 0020-38733 PEDESTAL,195MM,FLAT,ES,SIMP CATH,R2,
64 0021-09152 PEDESTAL, 200MM, SHOWER DBL NOTCH
65 0020-03435 PEDESTAL, 6, EXT
66 0020-30650 PEDESTAL OX/MLR/NIT 125MM FLAT
67 0020-03442 PEDESTAL, 100MM, OXIDE (REGULAR)
68 0020-31997 wPEDESTAL, 150MM,AL,FLAT FINGER
69 0020-03434 PEDESTAL, 5, EXT
70 0020-30922 INSERT #2 NI OX/MLR/NIT
71 0020-09284 FLAG, COMB SENSOR 3/16" PITCH
72 0200-00057 *WINDOW,SMALL STD WINDOW
73 0021-10643 FEEDTHRU,HELIUM,INSERT
74 0020-09550 BRKT. GAS SUPPLY
75 0242-88492 25 POS FEMALE ADAPTOR SECS PORT, ETCH
76 0200-09005 WINDOW, QUARTZ
77 0020-31275 PLUG DC
78 0020-03696 CLAMP RING, 6, DF
79 0020-30483 CLAMP RING XTAL NOTCH EXT 8 QER
80 0020-03672 RING, CLAMPING, VESPEL, POLY, 150MM
81 0242-11912 KIT, AUXILLARY GROUND STRAP, EMAX
82 0021-01996 ADAPTOR,TOP,CHAMBER,MARKII
83 0020-30195 COVER,TOP,METAL ETCH CHMBR
84 0020-31164 RING,FOCUSING, ALUM,150 MM, PRSP 3
85 0020-35475 CAPTON PADS NEW
86 0020-04191 SWITCH BRACKET
87 0200-09024 WINDOW, SMALL
88 0020-09373 SEAL, SMALL FACE
89 0020-32142 PLUG, FEEDTHRU
90 0050-08047 WELDMENT,LOWER,HELIUM FEEDTHRU W/SHIELD
91 0190-36456 FEETHRU,HELIUM DUAL ZONE
92 0050-08046 WELDMENT,HELIUM FEEDTHRU LINE WITH SHIEL
93 3870-01095 VALVE, PNEUMATIC 3-WAY
94 0020-33810 COVER, GAS FEED ASSY, DSP A3
95 0200-09468 RING,COVER,STAL,200MM NOTCH,.228 HOLE
96 0200-09222 RING,EXTERNAL QTZ,8"
97 0020-30652 COVER  PEDESTAL  OX/MLR/ NIT
98 0200-09474 RING,COVER, 150MM, POLY/XTAL, FLAT
99 0200-00064 RING COVER,125MM,QUARTZ, FLAT WELDMENT
100 3870-01165 VALVE QUICK EXHAUST 2 WAY 5-150PSI -30 T
101 0200-10176 SHADOW RING, QUARTZ, 200MM, NOTCH (2)
102 0200-09467 PICK-UP,DC,SXTAL,SI, .222HD,.400L
103 0020-09604 HOUSING
104 0020-32122 CAP, POLYTETRAFLURO ETHYENE (TEFLON)
105 UPH596-AM Oriental Motor, Vexta Stepping Motor 5Phase, DC 1.4A, 3.4V
106 UDX5114 Super Vexta 5-phase Driver 
107 UPD544HG1-NA ORIENTAL MOTOR VEXTA  DRIVER WITH STEP MOTOR
108   DENSEI-LAMBDA 3115 ,UPS 110V 650VA 400W JP
109 3870-01000  
110 0270-01728 ASSY, CATHODE/LINER LIFT FIXTURE, 200MM EMAX
111 0242-37744 KIT, RF "ON" INDICATOR, YELLOW LED
112 0270-00912 TOOLING,WAFER ALIGNMENT,TRANSPARENT,CLAM
113 0010-36159 ASSY, THROTTLE VALVE SHIPPING PLATE, DPS
114 0021-36130 FLANGE, BASE, ETCH CHAMBERS
115 0020-03696 CLAMP RING, 6, DF
116 0020-09026 CLAMPING CYLINDER
117 0020-30652 COVER  PEDESTAL  OX/MLR/ NIT
118 0021-09989 ESC 200MM(8")
119 0020-34862 PEDSTL,150MM,FLAT(1S),5.679 DIA,ESC,SIMP
120 0021-00805 PEDESTAL, AL, 200MM, NOTCH, CERAMIC, CON
121 0040-09389 PEDESTAL 200MM LOW TEMP CATHODE
122 0020-30314 PEDESTAL,6",METAL ETCH CHMBR,
123 0020-31709 PEDESTAL OX/MLR/NIT 150MM FLAT
124 0020-30651 INSERT #1 NI OX/MLR/NIT
125 0190-35221 SWITCH ATM 7/16-20 SAI/MS CLOSE DECREASI
126 0050-31740 WELDMENT, GAS FEED, TRENCH-NARROW GAP
127 0020-09039 STRIP
128 0015-00064 PLUG, LINER GROUND STRAP 200MM EMAX
129 0020-40164 PLUG, HOLE
130 0020-09067 MATCH ROD
131 0020-09723 ATTACHMENT TC AMP
132 0020-32117 HOUSING,INNER THROTTLE VALVE
133 0021-02092 PIN,PEDESTAL ALIGNMENT
134 0020-40164 PLUG, HOLE
135 0040-02609 LINER, CATHODE, MAGNET, SUPER-E
136 0200-09657 WINDOW, RECESSED, ENDPOINT
137 3700-02226 KIT LEYBOLD TURBO PUMP SEALS
138 0040-03261 FTG, BARATRON, EMAX
139 0021-09453 TOOL,CLEANING,PLATE,THROTTLE VALVE,DPS
140 0242-11912 KIT, AUXILLARY GROUND STRAP, EMAX
141 0020-04144 BRACKET, HE CONTROLLER
142 0150-03304 CABLE ASSY, AUXILLARY GROUND STRAP, EMAX
143 0020-19003 INSERT, SLIT VALVE SHO
144 0021-09097 PLATE, LINER ALIGNMENT, VESPEL
145   CERAMICS PROCESS     
146   QUARTZ PROCESS
147 0200-10073 INSULATOR,QUARTZ,200MM, SIMPLE CATHODE
148 0020-03430 INSERT, PED, EXT, 6
149 0020-03413 INSERT, 150 MM OXIDE
150 0020-03412 INSERT, 125MM OXIDE
151 0020-30701 INSERT POLYSULFONE OX/MLR/NIT 150MM
152 0020-09310 ISOLATOR
153   CYLINDER
154   AIR V/V
155   NW40 BELLOWS 
156 0270-35504 TOOL,B-FIELD MEASURMENT,CERAMIC ESC,ETCH
157 0240-05931 KIT, NON-APPLICATOR & MICROWAVE ULTIMA
158 0970-00003 UWAVE KIT DISABLE ULTIMA PLUS
159 0050-46566 BOTTOM NF3 CHAMBER A, B, C, D ULTIMA 1.5
160 0240-18443 KIT, FORELINE, POSITION B OR D, ULTIMA
161 0020-18368 INSULATOR, RF POST, BIAS, HDP-CVD
162 0020-18329 HARD STOP,LOWER,ROBOT EXTENSION
163 0020-18330 HARD STOP,UPPER,ROBOT EXTENSION
164 0020-18500 STRIP 1 SIDE COIL,GND CHAMBER,LOW K
165 0020-18436 GROUND CAP, SIDE COIL TENSIONER
166 0020-18481 STRAP,RF IN MATCH,TOP HDPCVD,LOWK
167 0015-09042 RESISTOR CERAMIC MOD
168 0020-34160 SHADOW RING,VESPEL,203MM
169 0200-35427 RIB, INSERT (5.00")
170 0020-18401 SCREW, DIFFUSER, CLEAN PORT, HDP-CVD
171 0020-32122 CAP, POLYTETRAFLURO ETHYENE (TEFLON)
172 0020-18513 DIFFUSER, CLEAN PORT, HDPCVD, ULTIMA
173 0200-09828 RING FOCUS EXC, 200/201 MM, W, NOTCH, WE
174 0050-41738 WELDMENT, CHAMBER O2 TOP FEED ULTIMA HDP
175 0020-18269 RING, TEFLON, GUARD THV HDP-CVD
176 0020-18482 STRAP,RF IN MATCH,SIDE HDPCVD,LOWK
177 0020-18899 WASHER, NOZZLE, ULTIMA HDPCVD
178 3030-04917 LFC SA40172 TEOS 0.5/MIN FULL SCALE
179 0020-18506 INSULATOR, BIAS RF MATCH ADAPTOR,HDP-CVD
180 0020-82135 FILAMENT, ARC CHAM, DIA 2.4 PURE TUNGSTEN
181 0020-18440 INSULATOR, LEFT SIDE COIL TENSIONER
182 0020-18514 WEDGE, CLEAN PORT, HDPCVD, ULTIMA
183 0040-09202 STANDOFF, SUSCEPTOR
184 0021-35988 FILTER,SLIT WINDOW
185 0020-18329 HARD STOP,LOWER,ROBOT EXTENSION
186 0040-18078 BELLOW,WELDMENT,HDP-CVD
187 3420-01042 INSUL XSTR TO-220 SILICONE RBR/FBRGLS .0
188 0020-09316 PLATE BLOKER,150MM
189 0020-18279 SHAFT, SIDE THV HDP-CVD
190 0020-10059 RING,WAFER LIFT RP 0020-09844/0020-09183
191 0200-09025 TUBE, QUARTZ 6MMX6.38
192 0200-18498 BAND GROUND,TOP COIL HDPCVD, LOW K
193 0020-09622 PLUG, THROTTLE VALVE
194 0020-18268 RING THROTTLE VALVE HDP-CVD
195 0050-40928 GAS LINE, IHC DUMP 2,  ULTIMA HDPCVD
196 0020-18497 BAND TOP COIL/IV SENSOR HDPCVD,LOW K.
197 0020-18498 BAND GROUND,TOP COIL HDPCVD, LOW K
198 0020-01371 PLATE 8" BLOCKER,EC WXZ
199 0020-18369 CONNECTOR,RF POST, BIAS, HDP-CVD
200 0021-03095 SCR,CENTERING, PURGE HEATER
201 0020-18274 FLANGE BODY, THV HDP-CVD
202 0020-34111 PLATE,LEVELING,HEATER,DXZ
203 0040-01045 SHIELD, THERMAL, DPA, LEFT SIDE
204 0040-01046 SHIELD, THERMAL, DPA, RIGHT SIDE
205 0020-34112 PLATE,REFERENCE,INDICATOR
206 0190-18169 RING, SPECER, ISO 250 MODIFIED, ULTIMA H
207 0940-01021 IND ELECT 0-1"RANGE.0005 "RSLN .001"AC L
208 0020-17113 COVER, MOD, CATHODE BASE, ULTIMA HDP
209 0020-32036 PLATE BLOCKER .100SX UNIVERSAL CHMBR,MES
210 0020-18536 RING,TEFLON,UPPER CHAMBER
211 0020-00022 AMAT PLATE PERF8" EC WXZ
212 0020-30406 PERF.PLATE 150MM BW
213 3700-02721 SEAL BONDED SLIT VALVE 8.628X1.378 CHEM
214 0190-09454 ASSY, DCVD ENDPOINT DETECTOR   *
215 0020-33538 PLATE,PERF OX, 200MM UNANODIZED
216 0021-02156 RING, MIDDLE, ISOLATOR
217 0200-09707 RING,CENTERING,150/140MM 1 JMF,(150.5),S
218 0050-43076 FORELINE THV TO TURBO SEIKO 2203P W/O EN
219 3870-02404 VALVE AIR OP CO 3WAY 1/4NPT 4MM ORFC SST
220 0150-06086 JUMPER, WATER FLOW INTLK, ULTIMA PLUS HD
221 0020-10941 ISOLATOR, TEFLON RING
222 0270-09023 FIXTURE ROBOT ARM ADJUST
223   TOOL, HP & HP+ ROBOT ZERO PLATE ZIG
224 0270-00289 TOOL, VHP & VHP+ ZERO PLATE ZIG
225 0020-31493 GAS DIST.PLATE,133 HOLES
226 0020-25769 VHP+ ROBOT UPPER WING & ARM(LEFT:0040-75907 RIGHT: 0040-75906)
227 0020-25770 VHP+ ROBOT LOWER WING & ARM(LEFT:0040-75907 RIGHT: 0040-75906)
228 0010-09441 ASSY WAFER LIFT D POSN PRSP
229 3870-02673 VALVE PNEU HEATED SHIELD CHMBR B 1.50- NO HEATED PAD ONLY COVER
230 0190-09134 CABLE ASSEMBLY,FIBER OPTIC 8,5FT
231 0190-09459 CABLE ASSY, FIBER OPTIC 20 FT
232 0020-31643 GAS DISTRIBUTION PLATE, ANODIZED, SXTAL,
233 0020-03379 GAS DISTRIBUTION PLATE
234 0020-31613 CYLINDER,LIFT,ALUM,150MM
235 0020-53882 BLADE, 8" BUFFER HP+, HTHU, RCF COMPATIB
236   EMPTY
237 0010-12811 HEATER LIFT ASSY, BKM-3/HP TXZ
238 0040-45505 COLLAR, DRIVE, HEATER LIFT, TXZ
239 0090-20302 ELECT ASSY 115/24VAC XFMR CVD AMP HTR
240 0240-20307 KIT ELEC SYSTEM AC TERMINAL LUGS
241 0010-20138 ASSY TC AMP HSNG
242 0200-00261 CHAMBER INSERT 200MM TXZ CIP
243 0200-36105 CHAMBER INSERT 200MM TXZ CIP
244 0100-20147 PCB ASSY MNFRAME DUAL DEGAS LIFT INTCONN
245 0020-23836 PLATE ADAPTER CLAMP G-12
246 0750-01003 CNTR COUNTING DIAL 15 TURNS COUTS TO 149
247 0020-22379 BRKT MTG SMOKE DETECTOR
248 0021-03104 PIN, HEATER, TXZ
249 0040-22487 FINGER EXTENDED LIFT HOOP 8" B101
250 0140-75111 HARN. ASSY, SHIELD TREATMENT/TURBO
251 0190-21713 SWITCH, HALF ATM
252 0015-70041 ASSY CAM FOLLOWER CROWNE
253 0020-29975 BAR RF CONNECTOR .125"L SHLDR VECTRA IMP
254 0020-29975 BAR RF CONNECTOR .125"L SHLDR VECTRA IMP
255 0020-40569 PLATE, CONV. ROBOT TC NON-ENP
256 0100-20066 PCB ASSY ANALOG SYNC DETECT
257   HARD DISK
258 0020-35818 PLATE, COOLDOWN PEDESTAL
259 0050-70011 TBG WELDMENT SUPPLY MANIFOLD HEAT EXCHAN
260 0020-21708 CHUCK 8" SEE
261 0020-70278 LIFTER 200MM WAFER ORIENTER P5000
262 0270-20032 WAFER,TEST ORIENTOR 8"
263 0020-13047 AlUMINUM OTF TEST WAFER 
264 0020-13048 SPINDLE, CALIBRATION WAFER
265 0020-70279 LIFTER 150MM WAFER ORIENTER P5000
266 0270-20044 TOOL CALIB. ORIENTER 8" SEE
267 0020-13217 PLATE, REINFORCING, EARTHQUAKE BRKT MTG
268 0720-01252 CONN CABLE CLAMP STRN RLF SHELL SIZE 17
269 1390-01554 WIRE  BRAID 7AWG 1"FLAT TINNED-CU WOVEN
270 0030-09022 TRAY ELEVATOR 125MM
271 3700-02060 ORING ID 1.237 CSD .103 CHEMRAZ SC513 80
272 3700-02329 ORING ID .299 CSD .103 CHEMRAZ 90
273 0040-62802 BRACKET MOUNTING 5-PHASE DRIVER
274 0021-10087 PLATE, SINGLE PLUG, RF GENERATOR RACK
275 0020-10667 BRKT MTG HDD SXS CONTROLLER
276 0020-09458 PLATE, UPPER TRAY ELEVATOR 125MM
277 0020-09942 PLATE LOWER TRAY ELEVATOR 125MM
278 0910-01139 FUSE SLO-BLO TIME-DELAY 1A 500V 13/32X1
279 0020-05227 BRACKET TUBE SUPPORT OTB FCW CENTURA MMF
280 0020-40006 MOUNT, DOUBLE SENSOR, INDEXER
281 3790-01622 STDFF/F 1/4RND 4-40 X 3/8LG ALUM NO-FINISH
282 0020-40703 KEY, COUPLING
283 4000-00046 FILLER PANEL ASSY CPCI 3U X4HP
284 0520-01036 ACTR RTRY 100DEG DBL VANE GREASELESS
285 0720-04919 CONN ADPTR DB25(M) TO DB25(M) RE-CONFIG
286 0720-04920 CONN ADPTR DB9(F) TO DB25(F)
287 0150-00599 CABLE ASSY, SERIPLEX ADAPTER, DUAL IHC A
288 0150-20221 CABLE ASSY, EBARA MONO PUMP
289 0225-50015  
290 1010-01065 LAMP BULB MINTR BAY IND TYPE 28V .08A
291 0620-01085 CABLE NETWORK ASSY
292 0820-00102 DETECTOR, OPTICAL SMOKE SENSING HEAD
293 3300-00956 FTG CPLG QDISC STRAIGHT INSERT 1/8BARB 1
294 3300-01679 FTG MUFFLER 1/8NPT BRS BODY SST ISRT
295 0680-01218 CB MAG THERM 3P 240VAC 40A BOLT-ON
296 0240-07439 KIT, AE BOX CONNECTOR
297 3300-04534 FTGEL STRN-RLF .770-.895D 1"HUB LIQ-TIGH
298 0020-09144 DETECTOR, EXTENSION
299 0020-70272 PIVOT ONE PIECE RIGHT
300 0020-70436 PLATE, CAM SLIT VALVE
301 3870-01049 VALVE SOL 3 WAY NC 24VDC SKT MNT
302 0240-75106 KIT, CENTURA CHAMBER THROUGH THE FLOOR
303 3300-02936 FTG EL 90 DEG 3.17"R ISO KF50 SST
304 1270-01822 SW    FLOW WATER 2-16L/MIN RC 1/2 PORT
305 0720-01598 CONN COAX ADPTR ANGLE JK-PLUG TYPE N UG
306 0090-76030 ASSY, SENSOR SOURCE NBLL
307 0090-76031 ASSY, SENSOR RECEIVER NBLL
308 0221-44634 EBARA LL PUMP INTERFACE ADAPTER
309 0050-41925 WELDMENT, 90 DEG, ULTIMA HDPCVD 
310 0190-09349 6 INCH SILANE SUSCEPTOR 
311   8INCH SUSCEPTOR 
312   4INCH SUSCEPTOR 
313   SHOWHEAD
314   QUARZ SHADOW RING 
315   300MM ESC
316   CTI CYRO-TORR 8F
317 0010-09463 Susceptor Assy TEOS 200mm.
318 0190-09349 6 INCH SILANE SUSCEPTOR
319 0010-10132 ASSY, SUSC, SQ P21 150MM, BWCVD SR
320   ESC 8"
321   ESC 6" FLAT
322 0020-31643 GAS DISTRIBUTION PLATE, ANODIZED, SXTAL,
323 0010-30228 HV MODULE
324 0010-04926 HV MODULE ASSY, NEGATIVE, CESC
325 0010-30091 HV MODULE ASSY
326 0010-93076 HV FILTER BOX ASSY W/NEGATIVE P/S, DPS+
327   HV4000  HV MODULE
328 0200-76026 BLADE 200MM BUFFER CERAMIC CONDUCTIVE
329 TEL  ELECTRON LIMITED TEL, PINCETTE ARM CERAMIC
330 0040-09098 BLADE 200MM
331 0020-70285 BLADE 8 INCH, BUFFER, FROG LEG
332 0020-26961 BLADE, 8" BUFFER, THIN METAL
333 0190-13325 CABLE, 75 FT UMBILICALS, HTESC
334 0140-07385 HARNESS ASSY HV MODULE DIRECT I/O 200M
335 0150-00110 CABLE ASSY, CONT. I/O SIG. TO REMOTE AC
336 Seiko Seiki Cable, STP 301CVB3 6.5 Meter PO21P RP921150-01-B 
337 0150-21431 CABLE ASSY EMO MAIN AC TO SYS AC
338 0150-36344 EMC, COMP., CBL ASSY, PUMP
339 0150-76190 CABLE ASSY, EMC COMP, SYSTEMS VIDEO 12 F
340 0150-02592 CABLE ASSY 72IN CENTURA SMIF RS232 KP TO
341 1390-01078 WIRE, 7AWG 3/4W, BRAID
342 3870-02136 VALVE PNEU HEATED SHIELD CHMBR B 1.50
343 0150-76193 EMC COMP.,CABLE ASSY,HEAT EXCHANGER 2
344 0150-00636 CABLE, ASSY, CONTACTOR INTERCONNECT AC M
345 0150-09017 ASSY FLT CABLE CHMBR INT B 40 POS
346 0150-00281 ROD HEATER-THERMOSTAT EXTENSION CABLE AS
347 0150-39308 CABLE ASSY,5-PHASE WITH MOTOR BREAK,DRIV
348 0140-20589 H/A SMOKE AMPLIFIER INTERCONNECT
349 0150-02595 C/A SMIF ERGOSPEED 72IN LLA/LLB KP TO RO 
350 0150-02413 H/A, HR-DTCU, CHAMBER A/B
351 0150-75213 CABLE ASSY, MFC ADAPTER, WITH EMI FILTER
352 0150-04523 CABLE ASSY,  D.C. POWER SUPPLY ULTIMA PL
353 0150-37225 CABLE,5-PHASE,AC POWER
354 0150-29687 CABLE
355 0150-75082 CABLE ASSY, ENCODER FLAT FLEX 6 POS
356 0090-09158 ELECTRICAL ASSY, THERM SW, MAG COIL O.T
357 0140-70085 HARN,CASSETTE HANDLER INTER. W/BRAKE
358 0150-04470 CABLE ASSY, SECOND SERIPLEX TO PLC
359 0150-04251 CABLE ASSY HUB PWRSP AC IN RADIANCE CH R
360 0150-20074 CABLE ASSY EMO MAIN AC TO SYSTEM AC
361 0150-18105 CABLE ASSY. CTR DUAL TC, ULTIMA
362 0140-20257 HARNESS ASSY., F/A LOAD LOCK
363 0140-03514 HARNESS ASSY, MAGNET DRIVER CONT INTLK B
364 0150-35226 CABLE ASSEMBLY,ROBOT TOP MOTOR (STD MF)
365 0140-70158 CABLE ASSY
366 0190-30355 LIGHT PEN COMPOSITE 5V 20MA
367 0620-01207 CABLE ASSY LOW-PASS FLTR 24
368 0150-09138 CABLE ASY SYS CONTROL.AC
369 0150-00800 CABLE, CATHODE TEMPERATURE SENSOR
370 0150-09876 CABLE, TEOS INTLK
371 0150-00306 CABLE ASSY. E/P MODULE MONOCHROMATOR
372 0150-09054 ASSY, CABLE RF MATCH
373 0150-75007 CABLE, ASSY LED, 24"
374 0140-76005 HARNESS ASSY CONTACTOR
375 0140-09452 CABLE
376 0090-09158 ELECTRICAL ASSY, THERM SW, MAG COIL O.T
377 0140-09542 HARN ASSY THERMO-SWITCH MAG COIL INTERLO
378 0140-09544 HARN ASSY ADAPTER, CONTACTOR HARNESS
379 0140-09159 HARNESS ASSY ROOTS BLOW JUMPER TO REMOTE
380 0140-36157 C/A MAGNET DRIVER ADAPTER
381 0190-76048 PWR SUP, RF 1250W 13.56MHZ 200/208VAC     -   OEM-12B-07
382 0190-70080 PWRSP RF 13.56 MHZ 1250 W RF GENERATOR    -   OEM12B-02
383 0920-00056 Advanced Energy VHF 2060 RF GENERATOR
384 0020-76180 ENDURA CENTURA COOL DOWN CHAMBER
385 0020-70283 CHAMBER ORIENTER P5000 
386 0020-31502 CHUCK,150MM,ASP
387 0020-31503 CHUCK,200MM,ASP
388   SEPILEX                            - MISSING PCB B/D-2ea, CARDCAGE 
389 0010-09490 P5000 MARK II - METAL       -   HV: 0010-30091 INCLUDE
390   SUNSAY GENERIC RF MATCHING NETWORKS    -  SMA-1000D
391 0010-13135 LID ASSY, TRANSFER CHAMBER, NON-ENP
392   VSP-1220S
393 0920-01014 wGEN RF 100-460KHZ 500W 50/60 HZ H2O COO -  LF-5
394 0010-09316 TEMP CONT ASSY CLOSED LOOP,TEOS
395   P5000 RF GEN PLASMA NITRIDE                        TL-10RV
396   CTI CRYOGENICS ON-BOARD FREQUENCY CONVERTER  8043069G002
397 0010-01442 MICROWAVE END POINT DETECTOR 
398 0010-10556 MONOCROMATOR MODULE ASSY-P/C ENDPNT 19"
399 0010-00745 ASSY, MONOCHROMATOR MODULE
400 0010-09935 MONOCHROMATOR MODULE ASSY, ENDPOINT
401 0010-20095 ASSY 3.5 MICROFLOPPY 1.4MB
402 0190-70081 PWRSP, RF 800W 13.56 MHZ 208 VAC (6B) - OEM-12B-02
403 1140-01086 wPWRSP DC 10KW SLAVE MAG                3152012 043Z
404 0290-01016 Ozone Generator, Onoda  OzoneRex   -  OR-4ZA
405   DXZ HEATER LIFT                
406 0040-01134 MOUNTING RING, DOME, 200MM DPS E-DTCU
407 0040-03713 RING,MOUNTING,DOME,ES DTCU,POLY DPS
408 0090-09244 COIL, MAGNET, SYMMETRICAL, 1.33 X 1.55
409   ENI OEM-6AM-1B-21
410 1140-01216 PWRSP DC 1500W GEN MICRNVE 3P 50-60HZ
411   EBARA TURBO-MOLECULAR PUMP CONTROLLER     305W-A
412 0010-00135 60V POWER SUPPLY ASSY
413   RF POWER ASTECH AUTOMATIC MATCHING NETWORK    ATL-100RA 
414   CRT MONITOR
415 0010-76015 wASSY ROBOT DRIVE 8"
416 0010-13321 ASSY, ROBOT DRIVE, 8"
417 0010-76000 wASSY ROBOT DRIVE
418   DC BL MOTOR CONTROLLER/ AUTOMOTION - LC4BP11000
419   Nihon Koshuha Microwave Automatching Controller  - AMC-0604-15 
420   MKS THROTTLE VALVE CONTROLLER,TYPE 252 - 252C-1-VPO-S 
421 0920-01044 GEN MAGNETRON MICROWAVE ASSY 1500W RPS
422 0010-10980 ASSY, TOP LID, RPS
423 0040-09005 BASE STD CATHODE with 0010-76306 
424   Seiko Seiki SCU H1000C Turbo Molecular Pump Controller
425   ENI SOLID STATE POWER GENERATOR OEM-12A-21041-51
426 0010-35511 ASSY,PID CONTROLLER-R2 CHMBR CENTURA
427   VAT VACUUM VALVE     02112-BA24-ARR1 
428   MKS/ASTEX ASTRON PLASMA GENERATOR   AX7651-2 
429   VAT  PENDULUM VALVE                             92548-PE21-1001
430 0100-09029 PCB ASSY, TURBO INTERCONNECT
431 0100-09127 PCB ASSY INTERCONN BD WAFER SENSOR
432 0100-09138 ASSY ROBOT INTERCONNECT
433 0100-76053 ASSY ROBOT INTERCONNECT PCB
434 0100-70028 ASSY, ROBOT INTERCONNECT PCB
435 0100-09103 PCB ASSY A/C INTERCONNECT
436 0100-09305 PCB, ASSY, RELAY INTERLOCK BOARD
437 0100-09104 PCB ASSY CONTACTOR INTERLOCK
438 0100-09123 PCB ASSY WAFER SENSOR BOARD
439 0100-35147 ASSY 3-WAY LIGHT PEN BOARD
440 0100-09115 ASSY PCB GAS PANEL ANALOG
441 0100-09242 PNEUMATICS DIST BD
442 0100-09094 wPCB ASSY TEOS HEATER CONTROL
443 0100-09040 PCB ASSY, SSR AC CONTROL
444 0100-00156 PCB ASSEMBLY ISOLATION AMPLIFIER
445 0100-09264 BD ASSY 486PC INTERFACE
446 0100-20040 PCB ASSY, REMOTE SUPPLY DISTRIBUTION
447 0100-09076 PCB ASSEMBLY BRAKE INTERCONNECT
448 0100-09110 PCB ASSSY MINI AI FILTER BOARD
449 0100-09156 OBS PCB ASSY, RF MATCH CONTROL
450 0100-09086 PCB ASSY STEPPER PWR DR
451 0100-00014 PCB ASSEMBLY OPTO DETECT
452 0100-09108 PCB ASSEMBLY LIQUID LEVEL SENSOR
453 0100-09237 PCB ASSEMBLY DUAL FREQUENCY WIRING INTER
454 0100-09127 PCB ASSY INTERCONN BD WAFER SENSOR
455 0100-09123 PCB ASSY WAFER SENSOR BOARD
456 0100-09116 #N/A
457 0100-09012 wPCB ASSY, P.S.BACKPLANE
458 0100-09129 wASY DRAWING TEOS STATUS BOARD
459 0100-09218 MAG GEN INTERFACE BOARD, ASP
460 0100-20143 PCB ASSY L LOCK WAFER SENSOR
461 0100-20243 ASSY, PCB, VAC PUMP & RGB INTERLOCK
462 0100-11002 PCB ASSEMBLY DIGITAL I/O
463 0100-09161 wASSY, EXPANDED RS-232 INTERCONNECT PCB
464 0100-09137 PCB ASSEMBLY ENCODER INTERFACE
465 0100-09262 PCB ASSY, V.D.S. DISTRIBUTION
466 0100-00168 PCB ASSY, RECIPE SELECT INTERCONNECT BOA
467 0100-00132 PCB ASSEMBLY SYNC DETECT EASE
468 0100-09201 CONTROL MODULE PCB ASSY TEOS TEMP CONT
469 0100-90889 INDEX CONTROL PCB
470 0100-09137 PCB ASSEMBLY ENCODER INTERFACE
471 0100-09271 BD ASSY 486 RS 232 DISTRIBUTION
472 0100-70034 ASSY, PCB EP VGA INTERCONNECT
473 0100-09131 wASSY DWG FLUID OVERFILL BOARD
474 0100-09071 PCB ASSY SBC I/O BREAKOUT
475 0100-00003 VME STEPPER CONTROLLER I
476 0100-09104 PCB ASSY CONTACTOR INTERLOCK
477 0100-09165 ASSY HIGH TEMP INTERFACE BD HEAT EXCHANG
478 0100-09041 PCB ASSY, HEAT EXCHNGR INTERFACE
479 0100-00245 PCB, ASSY, CONTROLLER,INTERCONN. CH TRAY
480 0100-00248 #N/A
481 0100-09196 PCB ASSY,E CHUCK CONTROLLER
482 0100-40033 PCBA,E-CHUCK PWR SUPPLY
483 0100-09212 PCB ASSY  ESC CONTROLLER BACKPLANE
484 0100-20070 PCB ASSY,MAG/LAMP DIST
485 0100-20049 wPCB ASSY,HEAT EXCHANGER DISTRIBUTION
486 0100-09107 PCB ASSY TEOS GAS INTERFACE
487 0100-09106 PCB ASSEMBLY,EXPANDED GAS PANEL INTERFAC
488 0100-09153 PCB,GAS PANEL INTERFACE W/O STANDOFFS
489 0100-09114 wPCB ASSY GAS PANEL
490 0100-70015 ASSY GATE VALVE INTERCONNECT PCB
491 0100-09031 PCB ASSY, REMOTE GAS PANEL
492 0100-09134 PCB   ASSY DIDO FUSE
493 0100-09020 PCB ASSY,  FUSE BOARD
494 0100-09117 ASSY PCB DIO FUSE BD
495 0100-00171 PCB ASSEMBLY INDEPENDENT HELIUM CONTROL
496 0100-09271 BD ASSY 486 RS 232 DISTRIBUTION
497 0100-70015 ASSY GATE VALVE INTERCONNECT PCB
498 0100-09299 ASSY, SERIAL SIDE BOARD
499 0100-09137 PCB ASSEMBLY ENCODER INTERFACE
500 0100-20003 OBS DIGITAL INPUT OUTPUT PCB
501 0100-09008 PCB ASSY, PNEUMATIC CONTROL
502 0100-20001 wPCB ASSY,SYSTEM ELECT.I
503 0100-18062 PCB ASSY,CHAMBER TRAY ULTIMA
504 0100-09205 INTERCONNECT BD H2O VDSII
505 0100-09058 PCB ASSY OPERATOR CONTROL PANEL
506 0100-09084 PCB ASSY MONITOR LIGHT PEN
507 0100-09245 PCB ASSY, 2PH STEP M DRIVER INTF BD
508 0100-09225 PCB ASSY, TC AMP/ INTERLOCK
509 0100-09226 PCB ASSY,ENDPOINT,WCVD
510 0100-20012 SHFPCB ASSY, ISOLATION AMPLIFIER
511 0100-00008 PCB ASSEMBLY T.C. GAUGE MONITOR
512 0100-09099 PCB ASSY CHAMBER INTERCONNECT BD
513 0100-51017 CHOPPER DRIVER PCB
514 0100-00060 PWB ASSY, CHOPPER DRIVE II
515 0100-00011 PCB ASSEMBLY CHOPPER DRIVE I
516 0100-00168 PCB ASSY, RECIPE SELECT INTERCONNECT BOA
517 0100-09126 0100PCB ASSY,REMOTE WIRING DISTRIBUTION
518 0100-09009 PCB ASSY BUFFER I/O
519 0100-09006 PCB ASSY, INTELLIGENT INTERFACE SBC
520 0100-09055 PCB   ASSY LIQUID SOURCE SBC
521 0100-70019 ASSY CONTROLLER DISTRIBUTION/WPS BD
522 0100-09102 wPCB ASSY CONTROLLER
523 0090-09061 ASSY THERMAL ELEC DRIVER
524 0100-09034 wPCB ASSY, LIQUID SOURCE INTERFACE
525 0100-09112 THERMOELECTRIC DRIVER
526 0090-09115 ASSY,THERMAL ELEC DRIVER II VER 3
527 0226-44114  
528 0226-47607  
529 0226-31593  
530 0240-31854  
531 0226-31128  
532 0190-09003 ACTUATOR, LINEAR 24V MOD
533 KLA-TENCOR  740-614883-000  Power PC - ES25
534 KLA  750-611944-000/AB MACROLINK 221048 MVCS 8/16 PORTS SIERRA MVC FREE SHI
535 0100-76042 ASSY, PCB EWOB AND OTF/CENTERFINDER
536 0100-01133 2'nd Source
537 0100-09003 wPCB ASSY, VME 7710 USE 0190-09368 *
538 0100-09022 wPCB ASSY, MINI AI/AO
539 0100-00008 w PCB TC GAUGE
540 0100-09153 PCB,GAS PANEL INTERFACE W/O STANDOFFS
541 0100-09006 PCB ASSY, INTELLIGENT INTERFACE SBC
542 0680-01540 CB 3P 240VAC 15A RING TERM BAB WESTING
543 0680-01199 CBMAG 3P 240VAC 30A LOAD SIDE ACCEPTS RI
544 0680-01219 CB MAG 3P 240VAC 50A LOAD SIDE ACPT R
545 0680-01196 CB MAG 3P 240VAC 20A LOAD SIDE ACCEPT
546 0680-01197 CB MAG 3P 240VAC 40A LOAD SIDE
547 0680-01208 CB MAG THERM 2P 240VAC 15A BOLT-ON QO
548 0680-01211 CB MAG THERM 2P 240VAC 20A BOLT-ON QO
549 0680-01218 CB MAG THERM 3P 240VAC 40A BOLT-ON QO
550 0680-01210 CB MAG THERM 1P 240VAC 20A BOLT-ON QO
551 0680-01213 CB MAG THERM 1P 240VAC 30A BOLT-ON QO
552 0680-01521 CB MAG THERM 3P 240VAC 60A BOLT-ON RI
553 1200-01081 RELAY CNTR 600 45A RESIS TIVE 120VAC COI
554 0680-01198 CB MAG 2P 240VAC 30A LOAD SIDE ACCEPT
555 0680-01142 CB FRAME ONLY 600V 3P 250A INTERCHG TRIP
556 0680-01268 CB MAG THERM 3P 600 VAC 125 A
557 0680-01266 CB MAG THERM 3P 480VAC 100A W-4-4/0 L
558 0680-01105 CB MAG THERM 1P 120/240VAC 15A BOLT-ON QUICK LAG TYPE
559 0680-01364 CB  MAG THERM 3P 240VAC 30A 50/60HZ
560 0680-01164 CB MAG THRM 3P 240 VAC 40A QUICKLAG SPEC
561 0680-01165 CB MAG THERM 1P 120VAC 20A QUICKLAG T
562 0680-01177 CBMAG THERM 3P 240VAC 30A QUICKLAG TYPE
563   MINIATURE CIRCUIT BREAKER 120/240V 30A - QOB2305252
564   SQUARE D NE-3910 HACR 20 AMP 120/240 VAC BREAKER 
565   SQUARE D 30A 2 Pole Circuit Breaker Type QOB 120/240 VAC LP-9602
566   CB MAG 1P 30A BOLT-ON
567   CB MAG 1P 35A BOLT-ON
568   FUJI ELECTRIC EL90PO EARTH LEAKAGE RELAY 30MA  AC100/200V
569   CB 40A
570 0150-35310 C/A MAIN FRAME UMBILICAL CMJ3 LONG
571 0150-76205 EMC COMP., CABLE ASSY, GAS PANEL #2 UMBI
572 0150-76176 CABLE ASSY, CHAMBER E, UMBILICAL, EMC CO
573 0150-35305 CABLE ASSY GAS PANEL #1 UMBILICAL LONG
574 0150-76206 EMC COMP., CABLE ASSY, CHMBR UMILICAL
575 0150-35308 C/A MAIN FRAME UMBILICAL CMJ1
576 0150-35307 C/A GAS PANEL UMBILICAL #2 LONG
577 0150-35311 C/A CBL COMB 20AWG LONG
578 0150-76211 EMC COMP., CABLE ASSY,PNEUMATICS UMBILIC
579 0150-35309 C/A MAIN FRAME UMBILICAL CMJ2 LONG
580 0150-76206 EMC COMP., CABLE ASSY, CHMBR UMILICAL 
581 0150-00096 CABLE, SYS I/O INTERCONN
582 0150-00097 SYSTEMS I/O STEPPER CBL
583 0150-00100 SYSTEMS I/O INTERCONNECT
584 0150-00094 SYSTEMS I/O INTERCONN. ANALOG CABLE 120
585 0150-00110 CABLE ASSY, CONT. I/O SIG. TO REMOTE AC
586 0150-20160 CABLE ASSEMBLY EMO INTERCONNECT
587 0227-05858 50 FT. EMC COMP, CABLE 2ND NESLAB CAPABI
588 0150-36131 ASSY CABLE,NESLAB CONTROL,75 FT, EMC COM
589   STP-301CVB 3M (RP921150-01-B)
590   STP-301CVB 6.5M (RP921150-01-B)
591   A214218/D
592   PWM-15M
593 0150-01969 CABLE ASSY, DRIVER CONTROL, 25' I/O BLKH
594 0150-76226 EMC COMP., CABLE, ANALOG #2 GAS PANEL
595 0150-02175 CABLE ASSY, SYSTEMS VIDEO, 65FT EMC COMP
596 0150-76217 EMC COMP., OPER PANEL, EXTENDED 46 FT.
597 0150-76225 EMC COMP., CABLE, ANALOG #1 GAS PANEL
598 0150-35792 C/A,93' PUMP UMBILICAL
599 0150-16088 CA HEAT EXCHANGER INTRFC,50 FT
600 0150-09510 CABLE ASSY R232ITC
601 0150-09145 CABLE ASSY FINAL VALVE N2 FLOW INTERLOCK
602 0150-09108 ASSY CABLE REM DIG 50 FT
603 0150-76223 EMC COMP., CABLE, DIGITAL #2 GAS PANEL
604 0150-38616 C/A,EMO/INTLK INTERCONN 20FT, 300MM ETCH
605 0150-35483 CABLE ASSY,VDS INTERCONNECT
606 0150-09145 CABLE ASSY FINAL VALVE N2 FLOW INTERLOCK
607 0150-09700 OBS,CABLE ASSY, PANEL TO REMOTE MATCH
608 0150-76165 C/A EMC COMP, HEAT EXCHANGER, 25FT CSI
609 0150-00636 CABLE, ASSY, CONTACTOR INTERCONNECT AC M
610 0150-09106 ASSY CABLE REMOTE 50 FT
611 0150-09145 CABLE ASSY FINAL VALVE N2 FLOW INTERLOCK
612 0226-31526 CABLE, ASSY FINAL VALVE INTLK
613 0150-01692 CABLE ASSY,75' GAS INTLK ABCD=OTHR (NON-
614 0150-09107 ASSY CABLE REM ANALOG 50
615 0150-09109 DC POWER FOOT
616 0150-09108 ASSY CABLE REM DIG 50 FT
617 0140-00892 #N/A
618 0140-70093 HARNESS ASSY CENTURA INTERFACE PUMP INTE
619 0226-47976 HARNESS, FLOW SENSOR INTERCONNECT
620 0150-35498 CABLE ASSY R.F. "ON" INDICATOR INTERCONN
621 0150-35966 CABLE ASSY,POWER,15 FT
622 0150-56535 #N/A
623 0140-02343 HARNESS ASSY, DUAL IHC CONTROL, CH A, B,
624 0140-35741 #N/A
625 0140-09038 HARNESS,CHAMBER C&D SLIT/OPEN/CLOSED
626 0150-35659 #N/A
627 0140-70004 HARNESS LOADER DISCONTACT
628 0150-70019 CABLE ASSY ENCODER ROBOT IC TO SYS 37 POS
629 0150-09109 DC POWER FOOT
630 0150-76167 EMC COMP., ASSY CABLE REMOTE DIGITAL 50
631 0150-76198 EMC COMP.,ASSY CABLE SYSTEM VIDEO 25
632 0226-31140 CABLE, RF INTLK REMOTE TO MAIN
633 0150-35227 C/A PUMP UMBILICAL
634 0150-09106 ASSY CABLE REMOTE 50 FT
635 0150-09844 CABLE ASSY REMOTE EMO 65'
636 0150-13114 CABLE ASSY, OZONATOR INTERFACE, 50 FT
637 0150-09108 ASSY CABLE REM DIG 50 FT
638 0150-55745 #N/A
639 0150-76161 #N/A
640 0150-35980 CABLE,DPS THROTTLE VLV. MTR.
641 0150-35483 CABLE ASSY,VDS INTERCONNECT
642 0150-10432 AUTOTUNER 24VDC POWER CABLE
643 0150-09104 RS232 C LIQ SOURCE CABLE 5O'
644 3870-02148 #N/A
645 0150-09957 CABLE ASSY, E/P MODULE- 5000 PARALLEL IN
646 0150-20641 CABLE ASSY TC CHAMBER TRAY INTERFACE
647 0150-76318 CABLE COAXIAL
648 0150-09200 RF Cable 55 Foot 16.
649 0150-09583 CABLE COAXIAL DELTA
650 0226-31917 CABLE COAX 30 FOOT
651 0150-37301 CABLE, 75 FT REMOTE RF, RG 393 COAXIAL
652 0150-00331 CABLE ASSY COAX RF PWR I
653 0150-76317 CABLE,RF-GEN SOURCE CENTURA DPS
654 0620-02864 CABLE ASSY COAX RG-217/U 79FT HN(M)/QDS-
655 0150-09264  RF Generator Cable 60FT
656 0150-70038 COAXIAL CABLE
657 0620-02684 CABLE ASSY HIGH VOLT MICROWAVE PWR GEN
658   ETC CABLE
659 0100-76042 ASSY, PCB EWOB AND OTF/CENTERFINDER
660 0100-01133  
661 0100-09003 wPCB ASSY, VME 7710 USE 0190-09368 *
662 0100-09022 wPCB ASSY, MINI AI/AO
663 0100-00008 w PCB TC GAUGE
664 0100-09153 PCB,GAS PANEL INTERFACE W/O STANDOFFS
665 0100-09006 PCB ASSY, INTELLIGENT INTERFACE SBC
666 0020-70436 PLATE, CAM SLIT VALVE
667 0090-76035 ASSY, SENSOR, WAFER SLIDE RECEIVER
668 0021-14960 DOOR, SLIT VALVE, WAFFLE-LESS, 200MM E-M
669 0010-79925  
670 0010-10556 MONOCROMATOR MODULE ASSY-P/C ENDPNT 19"
671 3700-02320 SEALASSY 12.250ID X .280W FLUOROLOY W/SS
672 0020-09310 ISOLATOR
673 3870-01000 Valve ASSY Throttle MXP 200mm Gear Type
674   TOOL, HP & HP+ ROBOT ZERO PLATE ZIG
675 0270-00289 TOOL, VHP & VHP+ ZERO PLATE ZIG
676 0020-25769 VHP+ ROBOT UPPER WING & ARM(LEFT:0040-75907 RIGHT: 0040-75906)
677 0020-25770 VHP+ ROBOT LOWER WING & ARM(LEFT:0040-75907 RIGHT: 0040-75906)
678 3870-02673 VALVE PNEU HEATED SHIELD CHMBR B 1.50- NO HEATED PAD ONLY COVER
679 0020-53882 BLADE, 8" BUFFER HP+, HTHU, RCF COMPATIB
680 0190-09349 6 INCH SILANE SUSCEPTOR 
681 0010-10132 ASSY, SUSC, SQ P21 150MM, BWCVD SR
682 MFC SEC-7440 SF6 300sccm
683 MKS 1159B-00020RV-SPCAL   HE 20sccm
684 MKS 179A51CR38M---S         HE 50sccm
685 MKS 1159B-13197-SPCAL      HE 20sccm
686 0200-76004 WINDOW, QUARTZ OTF
687 0010-09441 ASSY WAFER LIFT D POSN PRSP
688   8INCH SUSCEPTOR 
689   4INCH SUSCEPTOR 
690   SHOWHEAD
691   QUARZ SHADOW RING 
692   CB 40A  
 
📎 AMAT_Part_list_20190530.xlsx
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