Canon stepper spare parts
| Part No | Description |
| 5915PC-22t-B30 | FAN |
| BD2-4835-130 | SPACER,ADJUSTING(T=13) SUS |
| BD2-4835-150 | SPACER,ADJUSTING(T=15) SUS |
| BE1-8572 | HOLDER,RING 1 |
| BE1-8573 | HOLDER,RING 2 |
| BE1-8574 | HOLDER,RING 3 |
| BE1-9616 | SPACER |
| BF6-3046 | SCH ( Hand 1 ) Robot Arm |
| BG0-7754 | 2ND CONDENSER LENS UNIT,(B) |
| BG0-7755 | 2ND CONDENSER LENS UNIT,(C) |
| BG0-7896 | 2ND CONDENSER LENS (BC TYPE) |
| BG3-1407 | IMAGE PROCESSOR PCB ASS'Y |
| BG3-2090 | M-POS 3 PCB |
| BG3-2525 | IMAGE SHIFTER2 |
| BG3-2794 | IL5-C/D PCB ASS'Y |
| BG3-2851 |