
| No | P/N | Description | Remark |
| 1 | 0010-20511 | DC BIAS SHORT MONITOR HSNG | |
| 2 | 0090-39174 | TC AMP & OVER TEMP INTERLOCK HSNG | |
| 3 | 0010-20138 | ASS'Y TC AMP HSNG | |
| 4 | 0010-20331 | DUAL DEGAS DRIVER 120V | |
| 5 | TC TRANSMITTER K 0-500℃ 4-20mA | TT221K1JW(B) 5608007 | |
| 6 | 0010-21055 | PVD INNER ZONE CONTROLLER | |
| 7 | 0010-21699 | ASS'Y TC AMP HSNG | |
| 8 | 0010-20079 | PVD CHAMBER DRIVER 120V SINGLE | |
| 9 | 0010-09292 | ASS'Y TC AMP HSNG | |
| 10 | 0010-20697 | PVD CHAMBER DRIVER 200V SINGLE | |
| 11 | 0010-20764 | DUAL DEGAS DRIVER 200V |