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Canon stepper spare Part for sale (Used)
| Item | Part No | Description |
| 1 | BG4-5459 | PIEZO – DRIVE II – PCB ASS'Y |
| 2 | BG4-6456 | STAGE DSP PCB ASS'Y |
| 3 | BG4-6459 | OFCD-IF PCB ASS'Y |
| 4 | BG4-6460 | PIEZO – ANALOG – PCB ASS'Y |
| 5 | BG4-6465 | MEASUREMENT PCB (X) ASS'Y |
| 6 | BG4-7938 | BG8-3304, HROACD2(W) |
| 7 | BG4-6735 | Reticle Robot Unit (Need overhaul) |