|
Model |
Description |
Code |
Type |
|
SSW-80A-A |
80A(3Front) Scrubber |
|
80A |
|
SKW-80B-AVPF |
80B Spinner(Part Machine) |
|
80B |
|
9821X-MODEL2(NEC) |
MAIN PC |
2-39-54433 |
80A/80B |
EEMP-0013
(EEBA-00265) |
MAIN OPERATION
PANEL |
|
80A/80B |
|
CEDB-1013 |
PCB |
2-VC-15252-1 |
80A (INDEX) |
|
CERB-0016 |
PCB |
2-VC-15254-1 |
80A (TR) |
|
CESB-2011 |
PCB |
2-VC-19075 |
80A (SPIN) |
|
CESB-2012 |
PCB |
|
|
|
CESB-0012 |
PCB |
|
|
|
CEBB-201 |
PCB |
2-VC-17799 |
80A(BAKE) |
|
EERC-0011 |
PCB |
2-VC-19090 |
80B(TR) |
|
EESC-0012 |
PCB |
2-VC-19115 |
80B (SPIN) |
|
EEIC-001 |
PCB |
2-VC-19284 |
80B(IF-B) |
|
EEUC-0013 |
PCB |
2-VC-18987 |
80B(EEW) |
|
CEMI-0011 |
PCB |
2-VC-09977-1 |
PIO |
|
FC-9801-06K |
PCB |
2-39-48605 |
RAS |
|
CEMH-001 |
PCB |
2-VC-09976 |
SERIAL |
|
CEML-0013 |
PCB |
2-VC-10751-2 |
LAN |
|
SESI-104 |
PCB |
|
629 |
|
SEIO-104 |
PCB |
|
629 |
|
SEMR-104 |
PCB |
|
629 |
|
EMS BOARD(EMJ-8000R) |
PCB |
|
80B/A |
|
VACUUMLESS |
ARM |
2-39-55386 |
8" |
|
VACUUMLESS |
ARM |
2-39-55389 |
6" |
|
EESA-001(AU3575 N223) |
SPIN SERVO AMP |
2-39-48133 |
80B (SPIN) |
|
EESA-001A1(AU6356 N20) |
SPIN SERVO AMP |
|
80B (SPIN) |
|
S8HM-1031(PVA)1BOX(10PCS) |
BRUSH |
2-AJ-80487 |
8" |
|
S8HM-1031NYLON)1BOX(10PCS) |
BRUSH |
2-AJ-80486 |
8" |
|
|
SPIN CHUCK |
2-F2-33159 |
DEV
(8") |
|
|
SPIN CHUCK |
2-F3-32084 |
6" |
|
CESD-001 |
DRIVER |
2-VC-10369-1 |
BRUSH/DSONIC |
|
CESP-001 |
MAINTENACE PANEL |
2-VC-10752-5 |
80A/B |
|
CESP-OO1A |
MAINTENACE PANEL |
|
|
|
CESP-0018 |
MAINTENACE PANEL |
|
|
|
EESP-001 |
MAINTENACE PANEL |
|
|
|
9EMH-0011 |
BOX |
|
D-SONIC |
|
KL77-S03 // S10 |
SENSOR |
|
DIW |
|
PS500 |
UPS |
|
80A/80B |
|
80A |
SPIN HEAD UNIT |
|
80A |
|
80A |
AV/SV UNIT |
|
80A |
|
9ELP-1011 |
UNIT PANEL BOX |
|
629 |
|
TS3510N39E10 |
MOTOR |
2-39-45543 |
80B |
|
USAHEM-03DS32A |
MOTOR |
2-39-40384(2) |
80A |
|
TS4554N3E14 |
MOTOR |
2-39-54184 |
SK200 |
|
PK564AW-T30 |
MOTOR |
|
|
|
UPH596-B |
MOTOR |
2-39-39122 |
TR- Y |
|
PH544HG2-NB |
MOTOR |
2-39-46433 |
SCW NOZZLE(80B) |
|
M049-9515NG |
MOTOR |
|
IF-B |
|
PK569AG |
MOTOR |
|
|
|
E6CP-AG5C-C |
ENCODER |
2-39-44754 |
SCW NOZZLE |
|
D3173-124(2GK180K) |
GEAR HEAD |
2-39-00643 |
|
|
2GN50K |
GEAR HEAD |
2-39-00637 |
DSONIC |
|
2GN180K |
GEAR HEAD |
2-39-00643 |
BRUSH |
|
D2168-102 |
GEAR HEAD |
2-39-38907 |
ID/IFB- X |
|
UDX5114 |
DRIVER |
2-39-44061 |
IFB -Y |
|
D-2620 |
DRIVER |
|
DSONIC |
|
743 |
WIRE |
2-F4-90304 |
TR(80B) |
|
460 |
WIRE |
2-F4-90301 |
TR(80B) |
|
|
BRUSH WASHING POT |
2-F3-86339 |
80A |
|
|
UNIT DRAIN HOSE |
2-F3-91082 |
80B |
|
|
UNIT DRAIN POT |
2-F3-91114 |
80B |
|
|
|
2-F4-84904 |
|
|
|
UNIT DRAIN HOSE |
2-F4-91702 |
80B |
|
|
|
|
80B |
|
|
|
|
80A |
|
160mm |
|
2-F3-84552 |
80A |
|
374mm |
|
|
|
|
264mm |
|
|
|
|
250mm |
|
|
|
|
|
PIN |
2-J4-35537 |
80A |
|
Ø4/Ø3 |
NOZZLE |
2-F4-93981 |
80B |
|
|
NOZZLE COVER |
2-F4-87453 |
80A |
|
H=2mm |
CASSETTE BASE
(INDEXER) |
2-J4-33366 |
80A
(5,6") |
|
H=2mm |
CASSETTE BASE
(INDEXER) |
2-F4-92875 |
80B |
|
|
SI NOZZLE |
2-39-45412 |
80B |
|
|
MESH |
2-F4-32281 |
80A |
|
|
ARM |
2-J4-32218 |
80A,B |
|
|
LIFTER PIN TIP |
2-J4-31471 |
80A,B |
|
|
BLOCK
(UNIT DRAIN) |
2-J4-31375 |
80A |
|
2RSR7ZM+130L-2 |
LM GUIDE |
|
|
|
T5-10-132 |
TIMEING BELT
(SYCHRO BELT) |
|
|
|
T5-10-130 |
TIMEING BELT
(SYCHRO BELT) |
|
|
|
T5-10-110 |
TIMEING BELT
(SYCHRO BELT) |
|
|
|
T5-10-93 |
TIMEING BELT
(SYCHRO BELT) |
|
|
|
T5-10-80 |
TIMEING BELT
(SYCHRO BELT) |
|
|
|
110-T80-6.4 |
TIMEING BELT
(SYCHRO BELT) |
2-39-45691 |
INDEXER -Z
(80A,B) |
|
180XL |
|
2-39-22373 |
IFB -YZ |
|
160XL |
|
|
|
|
186XL |
|
|
|
|
ATP28XL050-A-N10 |
|
|
|
|
|
O-RING |
2-39-48766 |
80A,B |
|
ORIFICE 0.3mm |
NEEDLE |
2-39-38933-1 |
80B |
|
EX-14A |
SENSOR |
|
|
|
E2KQ-X10ME1 |
SENSOR |
|
|
|
RS-1000F |
SENSOR |
2-39-43737 |
LEAK |
|
LVP-P-A-2M |
SENSOR |
|
LEAK |
|
EE-1001 |
SENSOR |
2-39-12352 |
|
|
EE-SX674 |
SENSOR |
KSP1-037584 |
|
|
EE-SX670 |
SENSOR |
2-39-31529 |
|
|
SS-5GL2 |
SENSOR |
KSP1-037533 |
CASSETTE |
|
EX-F1 |
SENSOR |
|
LEVEL |
|
EX-13EB |
SENSOR |
|
|
|
E3C-JC4P |
SENSOR AMP |
2-39-47779 |
FLOWMETER |
|
RS-1000C |
SENSOR AMP |
2-39-41642 |
LEAK |
|
MS65L |
GAUGE |
2-39-37884 |
EXHAUST |
|
MS65L |
GAUGE |
|
EXHAUST |
|
FR51-300D |
GAUGE |
2-39-08929 |
EXHAUST |
|
DPX-200B |
GAUGE |
2-39-39135 |
VACUUM |
|
MS-DPX-2 |
GAUGE |
2-39-38713 |
VACUUM |
|
7Kgf |
GAUGE |
|
N2 |
|
5Kgf |
GAUGE |
|
N2 |
|
5Kgf |
GAUGE |
|
AIR |
|
INA-14-118 |
SPEED CON. |
|
|
|
INA-13-815 |
REGULATOR |
2-39-22225 |
N2 |
|
AR2000-02(171-005) |
REGULATOR |
2-39-36940 |
AIR |
|
INA-13-707 |
REGULATOR |
2-39-05923 |
N2 |
|
AR20-02H |
REGULATOR |
|
|
|
AR2060-02BG-10-01 |
REGULATOR |
|
|
|
AR111-01-X271 |
REGULATOR |
2-39-05912 |
AIR |
|
040M9A |
MANIFOLD |
2-39-31489 |
SV |
|
040M13A |
MANIFOLD |
2-39-38286 |
SV |
|
SS3YJ3-42-04-C4 |
MANIFOLD |
|
SV |
|
LIQ 2L/M 1/4B |
FLOW METER |
2-39-47352 |
|
|
LIQ 1L/M 1/4B |
FLOW METER |
2-39-47351 |
|
|
LIQ 500CC/M 1/5B |
FLOW METER |
2-39-47350 |
|
|
96-44005 |
FLOW METER |
KSP1-018227 |
EBR |
|
LIQ 1L/M 1/4B VIT |
FLOW METER |
KSP1-013663 |
|
|
LIQ 500cc/M 1/4 |
FLOW METER |
KSP1-017869 |
|
|
NI/min 0.2MPag(20) |
FLOW METER |
|
N2 |
|
NI/min 0.2MPag(30) |
FLOW METER |
|
N2 |
|
L/min 1Kg/Cm2 (10) |
FLOW METER |
|
N2 |
|
NV100CF-3P-60AT-200V-30MA |
BREAKER |
2-39-46062 |
80A |
|
2P20A100/200V 30mA |
BREAKER |
|
|
|
CQ2B32-20DC |
CYLINDER |
2-39-35313 |
AUTO DAMPER |
|
CDJ2B16-80 |
CYLINDER |
KSP1-008461 |
DSONIC |
|
ADF-16-30-P-A-KF |
CYLINDER |
KSP1-030371 |
|
|
CBVZ6OP1 |
FILTER |
|
DIW |
|
WG2FT1SS2 |
FILTER |
|
N2 |
|
UV |
FILTER |
|
EEW |
|
MD-15RM-EN |
IWAKI MAGNET PUMP |
|
|
|
AMG01-X0385-K |
VALVE |
|
PR |
|
AMDSZ0-X0377-K |
VALVE |
|
|
|
AMD00-X6US-4 |
VALVE |
2-39-45734 |
|
|
AMD01-6-4-2D |
VALVE |
2-39-42334 |
|
|
AMD01-X2D-0 |
VALVE |
2-39-22269 |
|
|
AMD11-X5D-0 |
VALVE |
2-39-32039 |
|
|
AMDSZ0-X0342-K |
VALVE |
|
SUCKBACK |
|
TMDZ02-6-2 |
VALVE |
KSP1-033371 |
VENT |
|
AMD13-X1514-K |
VALVE |
|
|
|
AMD31-15BUS-10-0-4 |
VALVE |
|
|
|
AMD11-X5D-0 |
VALVE |
2-39-32039 |
|
|
AMD35-15BUS-10-FX-2 |
VALVE |
|
|
|
AMDZ1-X0415 |
VALVE |
2-39-45771 |
|
|
AMD01-A6US-4 |
VALVE |
2-39-45725 |
|
|
AMD13-A8US-6 |
VALVE |
2-39-45733 |
|
|
VZA2220-M5-X2 |
VALVE |
2-39-22607 |
VACUUM |
|
1/8M(PF)X3 |
NOZZLE ADAPTER |
2-39-50035 |
JET NOZZLE |
|
AC7A-F |
BAFFLE DISK |
2-F2-33117 |
6" SCRUBBER |
|
AC7A |
BAFFLE DISK |
2-F2-33385 |
8" SCRUBBER |
|
6" |
SPIN CUP LOWER |
2-F1-30874 |
|
|
|
DRAIN PIPE |
2-F3-83345 |
COATER CUP |
|
8" BACKSIDE |
SPLASH GUARD |
2-AJ-80741-1 |
80A |
|
EEBM-0011 |
HETER CONTROLLER |
|
80B |
|
CEEI-0012 |
IF-B CONROLLER
BOX(STEPPPER) |
|
80B |
|
CEEI-0011 |
IF-B CONROLLER
BOX(STEPPPER) |
|
80B |
|
PFA |
TUBE |
500 |
|
|
PFA |
TUBE |
500 |
|
|
PFA |
TUBE |
100 |
|
|
PFA |
TUBE |
230 |
|
|
PFA |
TUBE |
300 |
|
|
PFA |
TUBE |
100 |
|
|
PFA |
TUBE |
10 |
|
|
PFA |
TUBE |
100 |
|
|
PFA |
TUBE |
30 |
|
|
PFA |
TUBE |
40 |
|
|
Constant Temp water |
TUBE |
100 |
|
|
AIR |
TUBE |
100 |
|
|
AIR |
TUBE |
50 |
|
|
INDEX CERAMIC ARM (8") |
80A INDEX ARM |
2-39-55836 |
60A/80A Scrubber |
|
0IK1GK-A3 |
BRUSH ROTATION MOTOR |
2-39-00549 |
60A/80A Scrubber |
|
D-240 |
BRUSH ROTATION MOTOR DRIVE |
2-39-33706 |
60A/80A Scrubber |
|
PH266-01GK-C5,2GK180K |
BRUSH SWING MOTOR |
2-39-36275 |
60A/80A Scrubber |
|
2CSMGK-101,2GK30K |
JET SWING MOTOR BLOCK |
2-39-00605 |
60A/80A Scrubber |
|
STEPDOWN TRANSFORMER |
STEPDOWN TRANSFORMER |
2-VC-14563 |
60A/80A Scrubber |
|
UPH566H-B-A25 |
80A TR VERTICAL MOTOR |
2-39-44434 |
60A/80A Scrubber |
|
USAHEM-03DS31 (FRONT-SIDE) |
80A SPIN MOTOR |
|
60A/80A Scrubber |
|
USAHEM-03DS51 (BACK-SIDE) |
80A SPIN MOTOR |
|
60A/80A Scrubber |
|
PT-005J 1A (NOZZLE 포함) |
D-SONIC GENERATOR |
2-39-52966 |
60A/80A Scrubber |
|
10PCS/SET |
PVA BRUSH |
2-AJ-804871 |
60A/80A Scrubber |
|
MEIDEN UD406/051A |
GEM CONTROL MONITOR |
|
60A/80A Scrubber |
