|
NO |
Maker |
P/N |
Description |
Equip Model |
|
1 |
Nikon |
4S017-841 |
(KBB05650-AE01) PC8 AIRDRV PRESSURE CONTROL
Nikon MPX(BOB Electronics) |
NSR-2205i11D |
|
2 |
Nikon |
|
Nikon 5" Reticle Case |
NSR-2205i11D |
|
3 |
Nikon |
|
Wafer Chuck (8"body for 6") |
NSR-2205i11D |
|
4 |
Nikon |
|
Sony XC-77 CCD Camera Module ( DC 10.5-15V , 2.2W ) |
NSR-2205i11D |
|
5 |
Nikon |
4B001-346AN |
Hammer Unit |
NSR-2205i11D |
|
6 |
Nikon |
ST32430N |
Vax Hdd( DKA300, DKA200 ) |
NSR-2205i11D |
|
7 |
Nikon |
KBA0020-A1Y |
Ball Screw |
NSR-2205i11D |
|
8 |
Nikon |
|
Reference Mark |
NSR-2205i11D |
|
9 |
Nikon |
|
FETCH ARM 8Inch.(6inch compatible, i11D) |
NSR-2205i11D |
|
10 |
Nikon |
|
Vaxstation 4000 /96 |
NSR-2205i11D |
|
11 |
Nikon |
|
SIDE SLIDE ARM(小), SIDE SLIDE ARM(大) |
NSR-2205i11D |
|
12 |
Nikon |
|
Power Supply |
NSR-2205i11D |
|
13 |
Nikon |
|
Irradiance meter |
|
|
14 |
Nikon |
|
R2205HMF Ver 3.09 (i11d) |
|
|
15 |
Nikon |
|
R2205HC Ver 6.09 (i11d) |
|
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