| No | P/N | Description | Remark |
| 1 | GLL-130088 | UNIVERSAL CONTROLLER | |
| 2 | 23021-653 | TEST ADAPTER CARD | |
| 3 | 1140-01312 | SMIF DC POWER SUPPLY BD | |
| 4 | 0730-01025 | Seris 344 ion gauge Controller | |
| 5 | 0660-01619 | CONTROL PHASE ANGLE 120VAC | |
| 6 | 0660-01548 | Ion Gauge Module PCB | |
| 7 | 0190-70103 | MONITOR LIGHT PEN INTERCONNECT BD | |
| 8 | 0190-36715 | VDS2 COM GP IO DIST BD | |
| 9 | 0190-36251 | VDS2 MATRIX INTERLOCK MCE | |
| 10 | 0100-76280 | 200MM SMIF INTERLOCK BOARD | |
| 11 | 0100-76184 | CH# PNEUMATIC INTERCONNECT BD | |
| 12 | 0100-76065 | MAIN FRAME PNEUMATIC BD | |
| 13 | 0100-76059 | M/F EXPANSION BD | |
| 14 | 0100-76038 | WAFER MAP LED BD | |
| 15 | 0100-76018 | PNEUMATIC 4WAY INT'R BD | |
| 16 | 0100-75071 | GAS PANEL DIST BD | |
| 17 | 0100-70015 | GATE VALVE INT BD | |
| 18 | 0100-38116 | WXZ HIGH PRESS INT BD | |
| 19 | 0100-35250 | CH# INTERFACE BD | |
| 20 | 0100-35217 | TXZ INTERLOCK BD | |
| 21 | 0100-35192 | DPS MAINTENANCE CONTROL BD | P/N 1400-01117 |
| 22 | 0100-35160 | TC AMP INTERLOCK BD | |
| 23 | 0100-35126 | INCOMPATIBLE GAS LOCKOUT BD | |
| 24 | 0100-35117 | CH# B INTERCONNECT BD | |
| 25 | 0100-35116 | CH# A INTERCONNECT BD | |
| 26 | 0100-35116 | CH# INTERCONNECT BD_표준화 | |
| 27 | 0100-35103 | M/W GEN INTERFACE BD_CENTURA | |
| 28 | 0100-35082 | MXP CH# INTERCONNECT BD | |
| 29 | 0100-35066 | CH# PNEUMATIC INTERCONNECT BD | |
| 30 | 0100-35060 | CH# POWER DISTRIBUTION BD | |
| 31 | 0100-35034 | STEP DRIVER POWER DIST BD | |
| 32 | 0100-20371 | IMP H20 WATER BOX INTERLOCK STATUS BD | |
| 33 | 0100-20318 | TC ISO AMP BD | |
| 34 | 0100-20313 | IMP CH# INTERCONNECT BD | |
| 35 | 0100-20304 | MUTUAL INTERLOCK BD | |
| 36 | 0100-20266 | RF INTERLOCK BD | |
| 37 | 0100-20244 | STEPPER DISTRIBUTION BD | |
| 38 | 0100-20243 | VAC PUMP & RGB INTERLOCK BD | |
| 39 | 0100-20241 | STEPPER DRIVER INTERFACE BD | |
| 40 | 0100-20228 | ENCODER INT'R BD | |
| 41 | 0100-20216 | STEPPER DRIVER INTERFACE BD | |
| 42 | 0100-20207 | DRT DRV ROBOT INTERFACE BD | |
| 43 | 0100-20206 | REMOTE GAS BOX INTERCONNECT BD | |
| 44 | 0100-20180 | PVD DRIVER BD | |
| 45 | 0100-20179 | DUAL DEGAS DRV BD | |
| 46 | 0100-20152 | SYSTEM EXPANSION BD | |
| 47 | 0100-20148 | HEATER LIFT STEP DRV INT'R BD | |
| 48 | 0100-20143 | LOADLOCK WAFER SENSOR BD | |
| 49 | 0100-20139 | DC BIAS SHORT MONITOR BD | |
| 50 | 0100-20098 | DUAL DEGAS DRV BD | |
| 51 | 0100-20086 | WAFER MAP LED BD | |
| 52 | 0100-20084 | MFC INERCONNECT BD | |
| 53 | 0100-20078 | LASER DRIVER BD | |
| 54 | 0100-20073 | WAFER DETECTOR BD | |
| 55 | 0100-20071 | 15V MONITOR BD | |
| 56 | 0100-20068 | CCD BD | |
| 57 | 0100-20063 | TC GAUGE BD | |
| 58 | 0100-20062 | LF TC FILER BD | |
| 59 | 0100-20060 | PVD DRIVER BD | |
| 60 | 0100-20059 | PUMP FRAME DIST BD | |
| 61 | 0100-20055 | BLOWOUT VALVE INTERCONNECT BD | |
| 62 | 0100-20052 | SERIAL/VIDEO INTERCONNECT BD | |
| 63 | 0100-20051 | TURBO INTERCONNECT BD | |
| 64 | 0100-20042 | PNEUMATIC SLIT VALVE INT'R BD | |
| 65 | 0100-20040 | REMOTE SUPPLY DIST BD | |
| 66 | 0100-20038 | RELAY CONTROL BD | |
| 67 | 0100-20033 | VME POWER STATUS BD | |
| 68 | 0100-20031 | 24V MONITOR BD | |
| 69 | 0100-20024 | ANALOG STEPPER DIST BD | |
| 70 | 0100-20016 | PNEUMATIC 3WAY INT'R BD | |
| 71 | 0100-20015 | CONVECTRON GAUGE INT'R BD | |
| 72 | 0100-20012 | ISOLATION AMPLIFIER BD | |
| 73 | 0100-20011 | CHAMBER A/B INTERCONNECT BD | |
| 74 | 0100-20005 | LOADER INTERCONNECT BD | |
| 75 | 0100-20004 | CH# INTERCONNECT BD | |
| 76 | 0100-20000 | 64CH AI MUX BD | |
| 77 | 0100-18062 | CH# INTERCONNECT BD ULTIMA | |
| 78 | 0100-18051 | TC FILTER BD | |
| 79 | 0100-18034 | CVD CH# PNEUMATIC INTERCONNECT BD | |
| 80 | 0100-16009 | SMIF-AYST WIDE BODY WTESTING BD | |
| 81 | 0100-16007 | TC AMP INTERLOCK BD | |
| 82 | 0100-16004 | FINAL SIGNAL INTERFACE BD | |
| 83 | 0100-09382 | CH# INTERCONNECT ASP B-D BD | |
| 84 | 0100-09381 | CH# INTERCONNECT ASP A-C BD | |
| 85 | 0100-09380 | WXZ HTR RETRACT BD | |
| 86 | 0100-09279 | TC AMP BD | |
| 87 | 0100-09255 | ASP TC INTERFACE BD | |
| 88 | 0100-09226 | MCVD ENDPOINT BD | |
| 89 | 0100-09223 | MAG GEN INTERFACE BD | |
| 90 | 0100-09222 | ASP INTERFACE BD | |
| 91 | 0100-09213 | ASP DISPLAY BD | |
| 92 | 0100-09205 | VDS(2) INTERCONNECT BD | |
| 93 | 0100-09205 | WV INTERCONNECT BD | |
| 94 | 0100-09204 | VDS(2) CONTROL BD | |
| 95 | 0100-09099 | CHAMBER INTERCONNECT BD | |
| 96 | 0100-09086 | LIFT CONTROL(STEPPER POWER DRIVER) BD | |
| 97 | 0100-09042 | AME PHOTO SENSOR | |
| 98 | 0100-09033 | TC AMPLIFIER BD | |
| 99 | 0100-09033 | TC AMPLIFIER BD | |
| 100 | 0100-09032 | LF TC FILER BD | |
| 101 | 0100-02722 | SMIF TRACK DRIVER BD | |
| 102 | 0100-01859 | GAS PANEL INTERLOCK DETECT BD | |
| 103 | 0100-01792 | 5Ph STEPPER DRIVER INTERFACE BD | |
| 104 | 0100-01130 | CCD BD | |
| 105 | 0100-01098 | LD DRIVER BD | |
| 106 | 0100-00639 | 200MM SMIF INTERLOCK BD | |
| 107 | 0100-00542 | INTERCONNECT E-DTCU BD | |
| 108 | 0100-00533 | MCA+ ELEC/DC RF ISO BD | |
| 109 | 0100-00413 | LINE FILTER BOT POWER BD | |
| 110 | 0100-00304 | WXZ MICROWAVE ENDPOINT BD | |
| 111 | 0100-00262 | FREQ MATCH MODULE | |
| 112 | 0100-00246 | CH# INTERCONNECT BD CEN_II | |
| 113 | 0100-00245 | CTRL CH# INTERCONNECT CEN_II | |
| 114 | 0100-00222 | SYSTEM POWER DIST BD | |
| 115 | 0100-00215 | AC DISTRIBUTION BD |